Contact-free plate conveyor
    3.
    发明授权
    Contact-free plate conveyor 有权
    无接触式板式输送机

    公开(公告)号:US07108123B2

    公开(公告)日:2006-09-19

    申请号:US11086790

    申请日:2005-03-22

    IPC分类号: B65G47/22

    摘要: In a contact-free plate conveyor including an arrangement of nozzles each having a cup-like shape widening to a planar rim thereof, air under pressure is supplied to the nozzles such that an air flow is generated toward and through a gap formed between the rims of the cups at high speed which generates a vacuum between the cup rims and the plate so as to hold the plate at a predetermined distance from the nozzle arrangement.

    摘要翻译: 在一个无接触板式输送机中,包括一个喷嘴布置,每个喷嘴各自具有加宽到其平面边缘的杯状形状,在压力下供给空气,使喷嘴产生气流,并通过形成在边缘之间的间隙 的杯子,其在杯形边缘和板之间产生真空,以将板保持在离喷嘴装置预定距离处。

    Inline transfer system and method
    6.
    发明授权
    Inline transfer system and method 失效
    在线传输系统和方法

    公开(公告)号:US07393159B2

    公开(公告)日:2008-07-01

    申请号:US10863064

    申请日:2004-06-07

    IPC分类号: B65G51/00

    摘要: An inline transfer system and method are provided for the secure transport and efficient processing of substrates such as glass substrates or semiconductor devices. A rotary conveyor is provided that includes a plurality of air nozzles which inject air to move a substrate above the plurality of air nozzles without the plurality of air nozzles making contact with the substrate. At least two independent processing units are operably coupled to the rotary conveyor. Advantageously, because a plurality of substrates may be processed in parallel, greater efficiency and flexibility are provided. Because the substrate can be moved without physical contact between the structure of the air nozzles and the substrate, the transfer is secure, clean, and efficient.

    摘要翻译: 提供了一种在线传输系统和方法,用于安全传输和有效处理诸如玻璃基板或半导体器件的基板。 提供一种旋转输送机,其包括多个空气喷嘴,其喷射空气以在多个空气喷嘴上方移动基板,而不会使多个空气喷嘴与基板接触。 至少两个独立的处理单元可操作地联接到旋转输送机。 有利地,由于可以并行处理多个基板,因此提供更高的效率和灵活性。 因为基板可以在空气喷嘴的结构和基板之间没有物理接触的情况下移动,所以转印是牢固,清洁和高效的。

    VACUUM PROCESSING APPARATUS
    9.
    发明申请

    公开(公告)号:US20190233224A1

    公开(公告)日:2019-08-01

    申请号:US16381644

    申请日:2019-04-11

    申请人: ULVAC, INC.

    IPC分类号: B65G49/00

    摘要: A vacuum processing apparatus having a small installation area is provided. A lifting plate is arranges inside a vacuum chamber, and a substrate holding device is arranged on the lifting plate to be able to be lifted up and down. An upper side processing device and a lower side processing device are provided in a processing region located beside a lifting region where the lifting plate moves up and down. An upper side moving device and a lower side moving device make the substrate holding device pass through the processing region, and a transfer device transfers the substrate holding device between the upper side moving device or the lower side moving device and the lifting plate. Because vacuum processing can be performed on the upper side and the lower side, the installation area of the vacuum processing apparatus is small.