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公开(公告)号:US20240081055A1
公开(公告)日:2024-03-07
申请号:US17953336
申请日:2022-09-27
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hsuan-Kai Wang , Chao-Sheng Cheng , Chi-Cheng Huang
IPC: H01L27/11531 , H01L21/3105 , H01L21/8234 , H01L27/11521 , H01L27/11548
CPC classification number: H01L27/11531 , H01L21/31053 , H01L21/823437 , H01L27/11521 , H01L27/11548
Abstract: A semiconductor structure includes a substrate. The substrate is divided into a first element region, a second element region and a boundary region. The boundary region is disposed between the first element region and a second element region. A first mask structure covers the first element region. A second mask structure is disposed in the second element region. A logic gate structure is disposed within the second element region.