公开(公告)号：US20150021293A1

公开(公告)日：2015-01-22

申请号：US14372667

申请日：2012-11-16

申请人： UNIVERSITY COLLEGE CORK-NATIONAL UNIVERSITY OF IRELAND, CORK

发明人： Michael Morris ,  Dipu Borah ,  Tandra Ghoshal ,  Parvaneh Mokarian

IPC分类号： B05D1/32 ,  B05D3/10

CPC分类号： B05D1/32 ,  B05D3/107 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/24355

摘要： A method for providing a nanopattern of periodically ordered metal oxide nanostructures on a substrate is described. The method comprises the steps of providing a microphase separated block copolymer as a thin film on a substrate, the block copolymer comprising a first polymer having an affinity for a cations of the metal and a second polymer having a lower affinity for the cations than the first polymer, and selectively incorporating a salt of the metal cation into the first polymer of the block copolymer by means of a solvation process prior to or after formation of the microphase separated block copolymer. The block copolymer film is then treated to oxidise the metal ion salt and remove the polymers leaving a nanopattern of metal oxide nanostructures on the substrate.

摘要翻译： 描述了一种在衬底上提供周期性有序的金属氧化物纳米结构的纳米图案的方法。 该方法包括以下步骤：在基底上提供微相分离的嵌段共聚物作为薄膜，所述嵌段共聚物包含对金属的阳离子具有亲和性的第一聚合物和对阳离子的亲和性低于第一聚合物的第一聚合物 并且在形成微相分离的嵌段共聚物之前或之后通过溶剂化方法选择性地将金属阳离子的盐掺入到嵌段共聚物的第一聚合物中。 然后处理嵌段共聚物膜以氧化金属离子盐并除去在衬底上离开金属氧化物纳米结构的纳米图案的聚合物。