MEMS SOUND TRANSDUCER WITH A CURVED CONTOUR OF A CANTILEVER ARM ELEMENT

    公开(公告)号:US20230188903A1

    公开(公告)日:2023-06-15

    申请号:US17987036

    申请日:2022-11-15

    申请人: USound GmbH

    IPC分类号: H04R19/00

    CPC分类号: H04R19/005 H04R2201/003

    摘要: A MEMS sound transducer for generating and/or detecting sound waves includes a support having a cavity wall which at least partially delimits a cavity of the MEMS sound transducer. At least one cantilever arm element includes a base section that is fixedly connected to the support. Each cantilever arm includes a flexible deflection section overhanging the cavity wall. At one end of the deflection portion is a base end that is disposed to face the cavity wall. Opposite the base end is a free end that is configured to be deflectable relative to the support in the direction of a stroke axis of the MEMS sound transducer. The base end of the deflection section in a sound transducer top view has a curved first contour.