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公开(公告)号:US11195905B2
公开(公告)日:2021-12-07
申请号:US16358556
申请日:2019-03-19
Applicant: United Microelectronics Corp.
Inventor: Hsiang-Hua Hsu , Liang-An Huang , Sheng-Chen Chung , Chen-An Kuo , Chiu-Te Lee , Chih-Chung Wang , Kuang-Hsiu Chen , Ke-Feng Lin , Yan-Huei Li , Kai-Ting Hu
IPC: H01L29/06 , H01L21/265 , H01L29/66 , H01L29/778
Abstract: A metal-oxide-semiconductor (MOS) transistor includes a substrate. The substrate has a plurality of trenches extending along a first direction and located on a top portion of the substrate. A gate structure line is located on the substrate and extends along a second direction intersecting with the first direction and crossing over the trenches. A first doped line is located in the substrate, located at a first side of the gate structure line, and crosses over the trenches. A second doped line is located in the substrate, located at a second side of the gate structure line, and crosses over the trenches.