公开(公告)号：US20230063757A1

公开(公告)日：2023-03-02

申请号：US17880130

申请日：2022-08-03

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony OUTTEN ,  Gregory MCGRAW ,  Kent Khuong NGUYEN ,  Steven Shigeki AOCHI ,  Neil D. NGUYEN ,  David SMILEY ,  Michael FILIPPI

IPC: B05B7/16

Abstract: An organic vapor jet printing (OVJP) device is provided that includes an OVJP print head having a nozzle configured to eject an organic material entrained in a carrier gas, one or more heaters to heat the nozzle, and one or more heat sinks to remove heat from the region of the nozzle. OVJP deposition devices and techniques are also provided in which heat sinks are arranged in the region of one or more OVJP nozzle, which maintain an ambient temperature of not more than 40 C. when the print head is operated at an operating temperature of 450 C.

公开(公告)号：US20230011198A1

公开(公告)日：2023-01-12

申请号：US17848674

申请日：2022-06-24

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony Outten ,  Kent Khuong Nguyen ,  Steven Shigeki Aochi ,  Neil D. NGUYEN

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/04

Abstract: Embodiments of the disclosed subject matter provide a system having at least one carrier gas source, at least one heated container that includes organic material, and a jet array print head that includes a plurality of apertures to print lines on a substrate, and that is connected to a vacuum source. The system includes a pair of gas bearing plates, with a top gas bearing plate and a bottom gas bearing plate, each having a plurality of pressure apertures and vacuum apertures. The top gas bearing plate applies a uniform force to a top surface of the substrate, and the bottom gas bearing plate applies a uniform force to a bottom surface of the substrate. The top gas bearing plate includes a slot configured for the print head to fit within. The vacuum apertures are arranged perpendicular to a direction of travel of the substrate.