-
公开(公告)号：US20230063757A1
公开(公告)日：2023-03-02
申请号：US17880130
申请日：2022-08-03
发明人： William E. QUINN , Craig Anthony OUTTEN , Gregory MCGRAW , Kent Khuong NGUYEN , Steven Shigeki AOCHI , Neil D. NGUYEN , David SMILEY , Michael FILIPPI
IPC分类号： B05B7/16
摘要： An organic vapor jet printing (OVJP) device is provided that includes an OVJP print head having a nozzle configured to eject an organic material entrained in a carrier gas, one or more heaters to heat the nozzle, and one or more heat sinks to remove heat from the region of the nozzle. OVJP deposition devices and techniques are also provided in which heat sinks are arranged in the region of one or more OVJP nozzle, which maintain an ambient temperature of not more than 40 C. when the print head is operated at an operating temperature of 450 C.
-
公开(公告)号：US20240052474A1
公开(公告)日：2024-02-15
申请号：US18228892
申请日：2023-08-01
IPC分类号： C23C14/04
CPC分类号： C23C14/04 , H10K71/135
摘要： Devices suitable for use in OVJP and similar deposition techniques are provided that include multiple delivery apertures that are uncoupled from one another, allowing for more plateau-like deposition profiles. Fabrication techniques for such devices are also provided in which multiple wafers are etched and laminated to one another to form a monolithic depositor block.
-
公开(公告)号：US20230269994A1
公开(公告)日：2023-08-24
申请号：US18104353
申请日：2023-02-01
IPC分类号： H10K71/13 , H01L21/02 , H01L21/302
CPC分类号： H10K71/13 , H01L21/02123 , H01L21/0223 , H01L21/302 , H10K2102/00
摘要： Implementations of the disclosed subject matter provide an organic vapor jet print die including a linear array of depositors, with each of the depositors having a cluster of apertures. The organic vapor jet print die may include at least one first aperture in each cluster of apertures is a delivery aperture that is in fluid communication with a carrier gas source and an evaporation oven. At least one second aperture in each cluster of apertures may be an exhaust aperture in fluid communication with a vacuum reservoir with a static pressure lower than that at the apertures. The delivery apertures and exhaust apertures may have a uniformity that is less than 0.4%.
-
公开(公告)号：US20220352467A1
公开(公告)日：2022-11-03
申请号：US17729465
申请日：2022-04-26
发明人： William E. QUINN , Craig Anthony OUTTEN , Gregory MCGRAW , Matthew KING , Xin XU
摘要： Organic vapor jet printing (OVJP) devices and techniques are provided that use a solid materials sublimation source to provide material for deposition on a substrate. Carrier gas from a carrier gas source entrains vapor from the solid material within each sublimation source for transport to a print head within a deposition chamber. The sublimation source includes a sufficiently long internal flow path to achieve an acceptable level of material saturation of the carrier gas.
-
-
-
搜索结果
4 条记录 (耗时 0.014 秒)
