公开(公告)号：US20180323373A1

公开(公告)日：2018-11-08

申请号：US15968166

申请日：2018-05-01

Applicant: Universal Display Corporation

Inventor： Bruno KERSSCHOT ,  Ronald STEVENS ,  Eric KOSTERS ,  Ron ASJES ,  William E. QUINN ,  Gregory MCGRAW

IPC: H01L51/00 ,  H01L51/56 ,  H01L21/66 ,  H01L27/32 ,  B41M3/00 ,  B05B1/00

CPC classification number: H01L51/0005 ,  B05B1/00 ,  B41J2/01 ,  B41M3/006 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  H01L22/20 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0012 ,  H01L51/56 ,  H01L2251/5353

Abstract: Devices and techniques that include use of a capacitive sensor to permit an OVJP print head to orient itself relative to conductive or dielectric traces on a printing substrate are disclosed. Such a sensor enables real-time measurement and closed-loop control of print head position with respect to substrate traces. This enables, for example, micron scale resolution in a dimension transverse to printing while permitting both the substrate and movement of the OVJP tool to scale to larger sizes than are achievable using conventional techniques and systems.