公开(公告)号：US20160211826A1

公开(公告)日：2016-07-21

申请号：US14598891

申请日：2015-01-16

Applicant: University of Central Florida Research Foundation, Inc.

Inventor： REZA ABDOLVAND ,  SEYEDEH HEDIYEH FATEMI ,  MOHAMMAD MODARRES-ZADEH

IPC: H03H9/17 ,  H04Q9/00 ,  H03H9/02

CPC classification number: H03H9/17 ,  H03H9/02244 ,  H03H9/02535 ,  H03H2009/155 ,  H04Q9/00 ,  H04Q2209/40

Abstract: A passive wireless sensor includes a substrate having at least one Microelectromechanical system (MEMS) piezoelectric resonator thereon. The MEMS piezoelectric resonator includes a piezoelectric layer between a top metal or semiconductor layer (top electrode layer) and a bottom metal or semiconductor layer (bottom electrode layer). The top electrode layer is a patterned top electrode layer including at least a first electrode for sensing an electrical signal and a second electrode for providing a ground reference. An antenna is connected to the first and/or second electrode for wirelessly transmitting the electrical signal and for receiving a wireless interrogation signal.

Abstract translation: 无源无线传感器包括其上具有至少一个微机电系统（MEMS）压电谐振器的基板。 MEMS压电谐振器包括在顶部金属或半导体层（顶部电极层）和底部金属或半导体层（底部电极层）之间的压电层。 顶部电极层是图案化的顶部电极层，其包括用于感测电信号的至少第一电极和用于提供接地参考的第二电极。 天线连接到第一和/或第二电极，用于无线传输电信号并用于接收无线询问信号。