公开(公告)号：US10892735B2

公开(公告)日：2021-01-12

申请号：US14598891

申请日：2015-01-16

Applicant: University of Central Florida Research Foundation, Inc.

Inventor： Reza Abdolvand ,  Seyedeh Hediyeh Fatemi ,  Mohammad Modarres-Zadeh

IPC: H03H9/17 ,  H03H9/02 ,  H04Q9/00 ,  H03H9/15

Abstract: A passive wireless sensor includes a substrate having at least one Microelectromechanical system (MEMS) piezoelectric resonator thereon. The MEMS piezoelectric resonator includes a piezoelectric layer between a top metal or semiconductor layer (top electrode layer) and a bottom metal or semiconductor layer (bottom electrode layer). The top electrode layer is a patterned top electrode layer including at least a first electrode for sensing an electrical signal and a second electrode for providing a ground reference. An antenna is connected to the first and/or second electrode for wirelessly transmitting the electrical signal and for receiving a wireless interrogation signal.