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公开(公告)号:US09921194B2
公开(公告)日:2018-03-20
申请号:US15164841
申请日:2016-05-25
Inventor: Xiaosong Du , Huan Yuan , Xulan Zhao , Penglin Wu , Yadong Jiang
CPC classification number: G01N30/6086 , G01N30/6095 , G01N2030/025 , G01N2030/6056
Abstract: A wavy micro gas chromatography column includes a silicon substrate and a bonded glass cover. A micro channel having a rectangular cross section is etched on the silicon substrate and coated with a stationary phase film. A projection figure of the micro channel on the silicon substrate includes multiple regular wavy curves. Each wavy curve is formed through alternately connecting first upper arcs with first lower arcs. Because the groove has a curving structure, the carrier gas velocity is decreased as the increase of the arc angle, resulting in an improvement of the flow uniformity at the zones between two adjacent bends but also an enlarging nonsymmetric distribution at the bends. Thus, an optimal curving structure can make the overall flow more even, and in turn achieve a better separation performance compared to the straight channel columns. Meanwhile, a wavy channel realizes a longer column length on a given area.
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公开(公告)号:US20160266073A1
公开(公告)日:2016-09-15
申请号:US15164841
申请日:2016-05-25
Inventor: Xiaosong Du , Huan Yuan , Xulan Zhao , Penglin Wu , Yadong Jiang
IPC: G01N30/02
CPC classification number: G01N30/6086 , G01N30/6095 , G01N2030/025 , G01N2030/6056
Abstract: A wavy micro gas chromatography column includes a silicon substrate and a bonded glass cover. A micro channel having a rectangular cross section is etched on the silicon substrate and coated with a stationary phase film. A projection figure of the micro channel on the silicon substrate includes multiple regular wavy curves. Each wavy curve is formed through alternately connecting first upper arcs with first lower arcs. Because the groove has a curving structure, the carrier gas velocity is decreased as the increase of the arc angle, resulting in an improvement of the flow uniformity at the zones between two adjacent bends but also an enlarging nonsymmetric distribution at the bends. Thus, an optimal curving structure can make the overall flow more even, and in turn achieve a better separation performance compared to the straight channel columns. Meanwhile, a wavy channel realizes a longer column length on a given area.
Abstract translation: 波浪微气相色谱柱包括硅衬底和粘合玻璃罩。 在硅衬底上蚀刻具有矩形横截面的微通道并涂覆有固定相膜。 硅衬底上的微通道的投影图包括多个规则的波浪曲线。 每个波浪曲线通过交替地将第一上部弧线与第一个较低的弧线交替地形成。 由于凹槽具有弯曲结构,所以载气速度随着弧角的增加而减小,导致两个相邻弯头之间的区域的流动均匀性得到改善,而且在弯曲处也是扩大的非对称分布。 因此,与直通柱相比,最佳弯曲结构可以使整体流动更均匀,从而达到更好的分离性能。 同时,波浪通道在给定区域实现更长的列长度。
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