公开(公告)号：US20170086259A1

公开(公告)日：2017-03-23

申请号：US15371205

申请日：2016-12-07

Applicant: University of Electronic Science and Technology of China

Inventor： Xiaosong Du ,  Yaru Li ,  Yuming Wu ,  Qi Yao ,  Pengfei Guo ,  Huan Yuan ,  Huiling Tai

IPC: H05B3/34 ,  H05B3/26

Abstract: The present invention relates to a serpentine film heater for adjusting temperature uniformity and a method of temperature adjusting, including a substrate and a serpentine film heating wire which is deposited on the substrate, wherein the serpentine film heating wire is formed by several parallel heating sections and connecting lines. In the longitudinal direction, the temperature uniformity is improved by adjusting the spacings between adjacent heating sections or line widths of the heating sections separately or in combination. In the transverse direction, the every heating section is adjusted to a shape which is wide in center and narrow at two ends. By adjusting the spacings and line widths in both transverse and longitudinal directions the present invention reduces heating power in the central part of the substrate and increases the heating power on the edges, thus compensates the heat transfer difference between center and edges and improves the temperature uniformity.