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公开(公告)号:US11929586B2
公开(公告)日:2024-03-12
申请号:US17181414
申请日:2021-02-22
Applicant: University of Southampton
Inventor: Masaaki Sakakura , Yanhao Yu , Peter Kazansky , Lei Wang
IPC: H01S3/00 , B23K26/0622
CPC classification number: H01S3/0057 , B23K26/0624
Abstract: A method of delivering optical energy to a substrate comprises applying a temporal group of optical pulses to a region of the substrate, wherein the temporal group comprises twenty or fewer pulses of a femtosecond pulse duration, arranged as a first subgroup of pulses comprising up to three pulses followed by a second subgroup of pulses comprising the remaining pulses in the temporal group; and wherein energies of the pulses are controlled such that pulses in the first subgroup have a first energy per pulse and pulses in a second subgroup of pulses have a second energy per pulse which is less than the first energy.
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公开(公告)号:US12265245B2
公开(公告)日:2025-04-01
申请号:US17628998
申请日:2020-08-27
Applicant: University of Southampton
Inventor: Masaaki Sakakura , Lei Wang , Peter Kazansky , Yanhao Yu , Yuhao Lei
IPC: G11B7/09 , C03C23/00 , G02B5/30 , G11B7/0045 , G02B5/32
Abstract: A method of fabricating an optical element includes providing a substrate of a transparent material in which is to be formed a plurality of birefringent nanostructures spaced apart; generating from the output of a source of femtosecond laser pulses a laser beam group comprising a plurality of focused seeding beams having a circular polarisation; directing the laser beam group onto the surface of the substrate at a first position and applying one or more femtosecond laser pulses from each beam to corresponding volumes in the substrate; repeatedly translating the laser beam group relative to the substrate parallel to the line of seeding beams; translating the laser beam group relative to the substrate and repeating the repeated translation and application of the femtosecond laser pulses; wherein the relative translation of the laser beam group and the substrate aligns the writing beam with successive corresponding volumes.
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公开(公告)号:US12040585B2
公开(公告)日:2024-07-16
申请号:US17181472
申请日:2021-02-22
Applicant: University of Southampton
Inventor: Masaaki Sakakura , Yanhao Yu , Peter Kazansky , Lei Wang
IPC: G11B7/0037 , B23K26/0622 , B23K26/08 , B23K26/082 , G01N21/95 , G02B5/30 , G02B26/08 , G02B27/09 , G02F1/33 , G11B7/127 , H01S3/00 , B82Y10/00
CPC classification number: H01S3/0057 , B23K26/0624 , B23K26/08 , B23K26/082 , B23K26/083 , G02B5/3083 , G02B26/0808 , G02B27/0944 , G02F1/33 , B82Y10/00
Abstract: A method of delivering optical pulses to a substrate comprises directing a focused beam from a source of optical pulses along a propagation direction onto a substrate; moving the substrate relative to the beam in a plane substantially orthogonal to the propagation direction and continuously along a first direction that includes spaced apart row locations on the substrate, and delivering a plurality of optical pulses from source as the beam reaches each row location; and between delivering the optical pulses at consecutive row locations, moving the beam relative to the substrate in one or more successive discrete movements along a second direction in the plane orthogonal to the first direction, to direct the beam to one or more spaced apart column locations on the substrate, and delivering a plurality of optical pulses from the source at each column location.
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