Method of pulsed laser irradiation with reduced thermal damage

    公开(公告)号:US11929586B2

    公开(公告)日:2024-03-12

    申请号:US17181414

    申请日:2021-02-22

    CPC classification number: H01S3/0057 B23K26/0624

    Abstract: A method of delivering optical energy to a substrate comprises applying a temporal group of optical pulses to a region of the substrate, wherein the temporal group comprises twenty or fewer pulses of a femtosecond pulse duration, arranged as a first subgroup of pulses comprising up to three pulses followed by a second subgroup of pulses comprising the remaining pulses in the temporal group; and wherein energies of the pulses are controlled such that pulses in the first subgroup have a first energy per pulse and pulses in a second subgroup of pulses have a second energy per pulse which is less than the first energy.

    Method of forming birefringent structures in an optical element

    公开(公告)号:US12265245B2

    公开(公告)日:2025-04-01

    申请号:US17628998

    申请日:2020-08-27

    Abstract: A method of fabricating an optical element includes providing a substrate of a transparent material in which is to be formed a plurality of birefringent nanostructures spaced apart; generating from the output of a source of femtosecond laser pulses a laser beam group comprising a plurality of focused seeding beams having a circular polarisation; directing the laser beam group onto the surface of the substrate at a first position and applying one or more femtosecond laser pulses from each beam to corresponding volumes in the substrate; repeatedly translating the laser beam group relative to the substrate parallel to the line of seeding beams; translating the laser beam group relative to the substrate and repeating the repeated translation and application of the femtosecond laser pulses; wherein the relative translation of the laser beam group and the substrate aligns the writing beam with successive corresponding volumes.

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