Hollow cylindrical cathode sputtering target and process for producing it
    3.
    发明授权
    Hollow cylindrical cathode sputtering target and process for producing it 失效
    中空圆柱形阴极溅射靶及其制造方法

    公开(公告)号:US06756081B2

    公开(公告)日:2004-06-29

    申请号:US10386231

    申请日:2003-03-11

    IPC分类号: C23C1434

    摘要: A hollow cylindrical target for a cathode sputtering unit with a hollow cylindrical sputtering material and a target holder is disclosed. The sputtering material has an annular cross section and concentrically surrounds a longitudinal segment of the target holder. The target holder extends out of the sputtering material at least at one end of the target to allow connection to the cathode sputtering unit. The at least one part of the target holder that extends from the sputtering material is a single part that can be detached from the target by at least one screw fitting.

    摘要翻译: 公开了一种具有中空圆柱形溅射材料和靶保持器的阴极溅射单元的中空圆柱形靶。 溅射材料具有环形横截面并且同心地围绕目标保持器的纵向段。 目标支架至少在靶的一端延伸出溅射材料,以允许连接到阴极溅射单元。 从溅射材料延伸的目标夹持器的至少一部分是能够通过至少一个螺钉配件从目标脱离的单个部件。

    SPUTTERING SYSTEM USING SILVER-BASED ALLOY
    4.
    发明申请
    SPUTTERING SYSTEM USING SILVER-BASED ALLOY 审中-公开
    使用银基合金的溅射系统

    公开(公告)号:US20070062810A1

    公开(公告)日:2007-03-22

    申请号:US11557265

    申请日:2006-11-07

    IPC分类号: C23C14/00

    CPC分类号: C22C5/06 Y10T428/31678

    摘要: An alloy based on silver is provided, which can be used for reflective layers with a reflection factor of >90% in the visible spectral range of daylight and which exhibits a high resistance to corrosion in sulfur-containing atmospheres. The alloy contains about 0.01 to 5 wt % indium and/or tin and/or antimony and/or bismuth and the remainder silver.

    摘要翻译: 提供了一种基于银的合金,其可用于在日光的可见光谱范围内具有> 90%的反射系数的反射层,并且在含硫气氛中表现出高抗腐蚀性。 该合金含有约0.01至5重量%的铟和/或锡和/或锑和/或铋,其余为银。

    Hollow cylindrical cathode sputtering target and process for producing it
    5.
    发明授权
    Hollow cylindrical cathode sputtering target and process for producing it 失效
    中空圆柱形阴极溅射靶及其制造方法

    公开(公告)号:US06645358B2

    公开(公告)日:2003-11-11

    申请号:US10047343

    申请日:2002-01-15

    IPC分类号: C23C1434

    摘要: A hollow cylindrical target for a cathode sputtering unit with a hollow cylindrical sputtering material and a target holder is disclosed. The sputtering material has an annular cross section and concentrically surrounds a longitudinal segment of the target holder. The target holder extends out of the sputtering material at least at one end of the target to allow connection to the cathode sputtering unit. The at least one part of the target holder that extends from the sputtering material is a single part that can be detached from the target by at least one screw fitting.

    摘要翻译: 公开了一种具有中空圆柱形溅射材料和靶保持器的阴极溅射单元的中空圆柱形靶。 溅射材料具有环形横截面并且同心地围绕目标保持器的纵向段。 目标支架至少在靶的一端延伸出溅射材料,以允许连接到阴极溅射单元。 从溅射材料延伸的目标夹持器的至少一部分是能够通过至少一个螺钉配件从目标脱离的单个部件。