公开(公告)号：US09377637B2

公开(公告)日：2016-06-28

申请号：US14022617

申请日：2013-09-10

申请人： V TECHNOLOGY CO., LTD.

发明人： Kazuya Otaki

IPC分类号： B23K26/066 ,  B23K26/06 ,  G02F1/13 ,  G02F1/1335 ,  G02F1/133

CPC分类号： G02F1/13306 ,  B23K26/0613 ,  B23K26/066 ,  G02F1/1309 ,  G02F1/133509

摘要： The present invention is a laser irradiation apparatus which is capable of selecting a laser light of a wavelength among a plurality of laser lights having different wavelengths according to a purpose of irradiation and irradiating an object to be irradiated with the laser light having the wavelength. The laser irradiation apparatus includes, on an optical path of a mixed light beam of the plurality of laser lights having different wavelengths, a slit having a width corresponding to a diffraction limit of the laser light having the shortest wavelength among the plurality of laser lights having different wavelengths, and an objective lens for focusing a laser light that has passed through the slit on the object to be irradiated.

摘要翻译： 本发明是一种激光照射装置，其能够根据照射的目的选择具有不同波长的多个激光之中的波长的激光，并照射具有波长的激光的被照射物体。 激光照射装置在具有不同波长的多个激光的混合光束的光路上包括具有对应于多个激光中具有最短波长的激光的衍射极限的宽度的狭缝，其具有 不同波长的物镜，以及用于将穿过狭缝的激光聚焦在被照射物体上的物镜。