公开(公告)号：US3930163A

公开(公告)日：1975-12-30

申请号：US45375074

申请日：1974-03-22

Applicant: VARIAN ASSOCIATES

Inventor： GERLACH ROBERT L ,  ROSSINI GEORGE

IPC: H01J37/08 ,  H01J3/04 ,  H01J27/00 ,  H01J27/02 ,  H01J27/20 ,  H01J49/10 ,  H05H7/08 ,  G01K1/08

CPC classification number: H01J27/20

Abstract: In an ion beam apparatus wherein ions are generated by the collision of electrons from a filamentary emitter with gas atoms in the vicinity of an electron-attracting grid structure, with subsequent extraction of the ions so generated from the vicinity of the grid structure and the focusing of these ions into a beam by an electrostatic lens system, a new way of mounting the ion extractor and the electrostatic lens system is disclosed which facilitates the removal and replacement of the filament and the grid structure. A configuration of the grid structure is also disclosed which optimizes the profile and the current density of the ion beam.

Abstract translation: 在离子束装置中，其中通过电子从丝状发射体与电子吸引栅格结构附近的气体原子的碰撞产生离子，随后从栅格结构和聚焦附近提取离子 这些离子通过静电透镜系统进入光束，公开了一种安装离子提取器和静电透镜系统的新方法，其有助于灯丝和栅格结构的去除和替换。 还公开了优化离子束的分布和电流密度的网格结构的配置。