公开(公告)号：US20240279812A1

公开(公告)日：2024-08-22

申请号：US18559997

申请日：2022-05-06

申请人： VAT HOLDING AG

发明人： Frantisek BALON ,  Kerim YUNT ,  Dominic MAYRHOFER

IPC分类号： C23C16/52 ,  C23C16/44 ,  C23C16/455

CPC分类号： C23C16/52 ,  C23C16/4412 ,  C23C16/45561

摘要： Disclosed is a vacuum processing system including a vacuum chamber, a controllable fluid application arrangement connected to the vacuum chamber and configured to provide inflow of fluid into the vacuum chamber in controlled manner and a controlling and/or regulating unit for controlling at least the controllable fluid application arrangement. The vacuum processing system comprises an atmospheric analyzer, the atmospheric analyzer is arranged and configured to determine atmospheric information of inside of the vacuum chamber and to provide the atmospheric information as a respective atmospheric signal and the controlling and/or regulating unit is configured to control the controllable fluid application arrangement as a function of the atmospheric signal.