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公开(公告)号：US20240229967A9
公开(公告)日：2024-07-11
申请号：US18546251
申请日：2022-02-16
申请人： VAT HOLDING AG
CPC分类号： F16K37/0041 , F16K51/02
摘要： Disclosed is a valve for regulating a volume or mass flow and/or for closing and opening a valve opening, having a valve seat, a valve closure and a drive unit which is coupled to the valve closure and is set up to provide a movement of the valve closure in such a way that the valve closure can be adjusted from an open position to a closed position and back. The vacuum valve includes a radio arrangement having at least one coupling element and a memory element, and information relating to a valve state can be provided by means of the memory element.
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公开(公告)号：US20240279812A1
公开(公告)日：2024-08-22
申请号：US18559997
申请日：2022-05-06
申请人： VAT HOLDING AG
发明人： Frantisek BALON , Kerim YUNT , Dominic MAYRHOFER
IPC分类号： C23C16/52 , C23C16/44 , C23C16/455
CPC分类号： C23C16/52 , C23C16/4412 , C23C16/45561
摘要： Disclosed is a vacuum processing system including a vacuum chamber, a controllable fluid application arrangement connected to the vacuum chamber and configured to provide inflow of fluid into the vacuum chamber in controlled manner and a controlling and/or regulating unit for controlling at least the controllable fluid application arrangement. The vacuum processing system comprises an atmospheric analyzer, the atmospheric analyzer is arranged and configured to determine atmospheric information of inside of the vacuum chamber and to provide the atmospheric information as a respective atmospheric signal and the controlling and/or regulating unit is configured to control the controllable fluid application arrangement as a function of the atmospheric signal.
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公开(公告)号：US20240133484A1
公开(公告)日：2024-04-25
申请号：US18546251
申请日：2022-02-16
申请人： VAT HOLDING AG
CPC分类号： F16K37/0041 , F16K51/02
摘要： Disclosed is a valve for regulating a volume or mass flow and/or for closing and opening a valve opening, having a valve seat, a valve closure and a drive unit which is coupled to the valve closure and is set up to provide a movement of the valve closure in such a way that the valve closure can be adjusted from an open position to a closed position and back. The vacuum valve includes a radio arrangement having at least one coupling element and a memory element, and information relating to a valve state can be provided by means of the memory element.
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