公开(公告)号：US20190259559A1

公开(公告)日：2019-08-22

申请号：US16270440

申请日：2019-02-07

Applicant: VEECO INSTRUMENTS, INC.

Inventor： Rustam YEVTUKHOV ,  Ivan SHKURENKOV ,  Boris DRUZ ,  Alan HAYES ,  Robert HIERONYMI

IPC: H01J37/02 ,  H01J37/06 ,  H01J37/08 ,  H01J3/02

Abstract: An ion beam neutralization system, often referred to as a plasma bridge neutralizer (PBN), as part of an ion beam (etch) system. The system utilizes an improved filament thermo-electron emitter PBN design, that when utilized in a particular method of operation, greatly extends filament life and minimizes variation in neutralizer operating parameters for long periods of operation. The PBN includes a solenoidal electromagnetic that produces an axial magnetic field within the PBN and a magnetic concentrator that facilitates the alignment of the magnetic field and inhibits stray fields. The PBN can readily provide a filament lifetime of at least 500 hours.