公开(公告)号：US10347457B1

公开(公告)日：2019-07-09

申请号：US15847485

申请日：2017-12-19

申请人： Varian Semiconductor Equipment Associates, Inc.

发明人： Alexander S. Perel, Sr. ,  David P. Sporleder ,  Adam M. McLaughlin ,  Craig R. Chaney ,  Neil J. Bassom

IPC分类号： H01J37/02 ,  H01J37/30

摘要： A system and method for varying the temperature of a faceplate for an ion source is disclosed. The faceplate is held against the chamber walls of the ion source by a plurality of fasteners. These fasteners may include tension springs or compression springs. By changing the length of the tension spring or compression spring when under load, the spring force of the spring can be increased. This increased spring force increases the compressive force between the faceplate and the chamber walls, creating improved thermal conductivity. In certain embodiments, the length of the spring is regulated by an electronic length adjuster. This electronic length adjuster is in communication with a controller that outputs an electrical signal indicative of the desired length of the spring. Various mechanisms for adjusting the length of the spring are disclosed.