公开(公告)号：US20140326186A1

公开(公告)日：2014-11-06

申请号：US14332583

申请日：2014-07-16

Applicant: Veeco Instruments, Inc.

Inventor： Ajit Paranjpe ,  Alexander Gurary ,  William Quinn

IPC: C30B25/14 ,  C30B25/12

CPC classification number: C30B25/14 ,  C30B25/10 ,  C30B25/12 ,  C30B35/00

Abstract: A VPE reactor is improved by providing temperature control to within 0.5° C., and greater process gas uniformity via novel reactor shaping, unique wafer motion structures, improvements in thermal control systems, improvements in gas flow structures, improved methods for application of gas and temperature, and improved control systems for detecting and reducing process variation.

Abstract translation: 通过提供温度控制在0.5℃以内，通过新型的反应器成型，独特的晶片运动结构，热控制系统的改进，气流结构的改进，改进的气体应用方法和 温度和改进的控制系统，用于检测和减少过程变化。