专利检索 ap:("Vesper Technologies Inc.") AND inv:"Wang Kyung Sung" 第 1 页

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发明授权
Piezoelectric micro-electro-mechanical systems (MEMS) device with a beam strengthening physical element 有权

公开(公告)号：US10825982B1

公开(公告)日：2020-11-03

申请号：US14851432

申请日：2015-09-11

申请人： Vesper Technologies Inc.

发明人： Robert J. Littrell , Karl Grosh , Craig Core , Yu Hui , Wang Kyung Sung

IPC分类号： H01L41/23 , H01L41/113

摘要： A piezoelectric Micro-Electro-Mechanical Systems (MEMS) device comprising: a physical element; and a piezoelectric sensor element, with the physical element positioned in proximity to a moving portion of the piezoelectric sensor element, and with proximity of the physical element to the moving portion reducing a probability of breakage of the piezoelectric sensor element by limiting an excursion of the piezoelectric sensor element, relative to a probability of breakage of the piezoelectric sensor element in another piezoelectric MEMS device without the physical element.