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16 条记录 (耗时 0.016 秒)

    Staggering of openings in electrodes for crack mitigation
    1.
    发明授权
    Staggering of openings in electrodes for crack mitigation 有权

    公开(公告)号：US10566517B1

    公开(公告)日：2020-02-18

    申请号：US14851560

    申请日：2015-09-11

    申请人： Vesper Technologies Inc.

    发明人： Robert J. Littrell ,  Karl Grosh

    IPC分类号： H01L41/083 ,  H01L41/047 ,  B06B1/06 ,  H01L21/02

    摘要： A transducer comprising: at least one piezoelectric layer; a first patterned conductive layer that is patterned with a first opening; a second patterned conductive layer that is patterned with a second opening; wherein at least one piezoelectric layer is between the first and the second patterned conductive layers in a stack; and wherein a position of the first opening is staggered relative to a position of the second opening in the stack to mitigate an occurrence of crack propagation through the layers.

    Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer
    4.
    发明授权
    Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer 有权

    公开(公告)号：US11259124B2

    公开(公告)日：2022-02-22

    申请号：US16353934

    申请日：2019-03-14

    申请人： Vesper Technologies Inc.

    发明人： Karl Grosh ,  Robert J. Littrell

    IPC分类号： H04R17/02 ,  H04R31/00 ,  H04R7/06 ,  H01L41/27 ,  H01L41/314 ,  H01L41/332

    摘要： A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.

    PIEZOELECTRIC MEMS MICROPHONE
    7.
    发明申请
    PIEZOELECTRIC MEMS MICROPHONE 审中-公开

    公开(公告)号：US20200148532A1

    公开(公告)日：2020-05-14

    申请号：US16196922

    申请日：2018-11-20

    申请人： The Regents of the University of Michigan ,  Vesper Technologies Inc.

    发明人： Karl Grosh ,  Robert J. Littrell

    IPC分类号： B81B7/02 ,  H04R17/02 ,  B81B7/00

    摘要： A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.

    Piezoelectric MEMS microphone
    8.
    发明授权
    Piezoelectric MEMS microphone 有权

    公开(公告)号：US10170685B2

    公开(公告)日：2019-01-01

    申请号：US14208827

    申请日：2014-03-13

    申请人： The Regents of the University of Michigan ,  Vesper Technologies Inc.

    发明人： Karl Grosh ,  Robert J. Littrell

    IPC分类号： H04R17/02 ,  H01L41/083 ,  H01L41/187 ,  H01L41/113 ,  B81B3/00 ,  H04R17/00

    摘要： A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.

    Acoustic Transducer with Gap-Controlling Geometry and Method of Manufacturing an Acoustic Transducer
    9.
    发明申请
    Acoustic Transducer with Gap-Controlling Geometry and Method of Manufacturing an Acoustic Transducer 审中-公开
    具有间隙控制几何的声学传感器和制造声学传感器的方法

    公开(公告)号：US20150271606A1

    公开(公告)日：2015-09-24

    申请号：US14702319

    申请日：2015-05-01

    申请人： Vesper Technologies Inc.

    发明人： Karl Grosh ,  Robert J. Littrell

    IPC分类号： H04R17/02 ,  H01L41/314 ,  H01L41/332 ,  H01L41/27 ,  H04R7/06 ,  H04R31/00

    CPC分类号： H04R17/02 ,  H01L41/27 ,  H01L41/314 ,  H01L41/332 ,  H04R7/06 ,  H04R17/025 ,  H04R31/00 ,  H04R31/003 ,  H04R2201/003 ,  H04R2410/03

    摘要： A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.

    摘要翻译： 优选实施例的换能器包括换能器和多个相邻的锥形悬臂梁。 每个梁限定了梁基部，梁尖端和设置在梁基部和梁尖之间的梁主体。 梁被布置成使得每个梁尖端朝向公共区域延伸。 每个光束沿着光束基座连接到基板，并且沿着光束主体离开基板。 制造换能器的优选方法可以包括：将块状的压电和电极的交替层淀积到衬底上，处理沉积的层以限定块中的悬臂几何形状，在块中沉积金属迹线，以及从块中的衬底释放悬臂梁 。