公开(公告)号：US10825982B1

公开(公告)日：2020-11-03

申请号：US14851432

申请日：2015-09-11

申请人： Vesper Technologies Inc.

发明人： Robert J. Littrell ,  Karl Grosh ,  Craig Core ,  Yu Hui ,  Wang Kyung Sung

IPC分类号： H01L41/23 ,  H01L41/113

摘要： A piezoelectric Micro-Electro-Mechanical Systems (MEMS) device comprising: a physical element; and a piezoelectric sensor element, with the physical element positioned in proximity to a moving portion of the piezoelectric sensor element, and with proximity of the physical element to the moving portion reducing a probability of breakage of the piezoelectric sensor element by limiting an excursion of the piezoelectric sensor element, relative to a probability of breakage of the piezoelectric sensor element in another piezoelectric MEMS device without the physical element.

公开(公告)号：US11099078B1

公开(公告)日：2021-08-24

申请号：US16110528

申请日：2018-08-23

申请人： Vesper Technologies, Inc.

发明人： Robert Littrell ,  Yu Hui ,  Craig Core ,  Ronald Gagnon

IPC分类号： G01K1/14 ,  G01K1/08 ,  G01K13/00 ,  G01K7/00 ,  G01K11/22 ,  G01K7/18 ,  G01H3/00

摘要： An acoustic sensor has a MEMS die with MEMS structure. Among other things, the MEMS structure includes a diaphragm configured to mechanically respond to incident acoustic signals, and a temperature sensor member configured to detect temperature.