公开(公告)号：US20200004057A1

公开(公告)日：2020-01-02

申请号：US16447474

申请日：2019-06-20

申请人： Via Mechanics, Ltd.

发明人： Kazuya MATSUMOTO ,  Kazuo WATANABE ,  Atsushi SAKAMOTO ,  Masanori SATO ,  Mitsuru KATO ,  Masaru KIKUCHI

IPC分类号： G02F1/11 ,  H01S3/00 ,  H05K3/00 ,  B23K26/382

摘要： A laser processing apparatus disclosed in the present application includes: an optical deflection unit capable of changing a deflection direction of and outgoing energy of an incoming laser pulse by changes of a frequency of and an amplitude of a driving signal to be supplied; and a control unit configured to supply driving signals with amplitudes corresponding to respective frequencies. In a laser processing apparatus configured to process a workpiece by leading outgoing laser pulse of the optical deflection unit to the workpiece and irradiating the workpiece with the laser pulse, as the amplitude corresponding to each of the frequencies, the control unit supplies an amplitude having the ratio that is close to the lowest ratio among ratios of the outgoing energy with respect to the incoming energy of the laser pulse at an amplitude having the largest outgoing energy of the optical deflection unit.