公开(公告)号：US20250112433A1

公开(公告)日：2025-04-03

申请号：US18894261

申请日：2024-09-24

Applicant: Via Mechanics, Ltd.

Inventor： Kazuya MATSUMOTO ,  Nobuyoshi OHTANI

IPC: H01S3/038 ,  H01S3/08

Abstract: A laser oscillator includes an outer electrode, an inner electrode forming a discharge chamber between the inner electrode and the outer electrode, a first resonator mirror provided on a first end side of the outer electrode and the inner electrode, a second resonator mirror provided on a second end side of the outer electrode and the inner electrode and configured to reflect the laser light between the second resonator mirror and the first resonator mirror, and a support member configured to support the inner electrode. The support member has an opening portion through which the laser light passes at a position corresponding to the discharge chamber, and at least a part of the opening portion has an opening width smaller than a beam diameter of the laser light emitted from the discharge chamber and serves as a space filter portion.

公开(公告)号：US20200004057A1

公开(公告)日：2020-01-02

申请号：US16447474

申请日：2019-06-20

Applicant: Via Mechanics, Ltd.

Inventor： Kazuya MATSUMOTO ,  Kazuo WATANABE ,  Atsushi SAKAMOTO ,  Masanori SATO ,  Mitsuru KATO ,  Masaru KIKUCHI

IPC: G02F1/11 ,  H01S3/00 ,  H05K3/00 ,  B23K26/382

Abstract: A laser processing apparatus disclosed in the present application includes: an optical deflection unit capable of changing a deflection direction of and outgoing energy of an incoming laser pulse by changes of a frequency of and an amplitude of a driving signal to be supplied; and a control unit configured to supply driving signals with amplitudes corresponding to respective frequencies. In a laser processing apparatus configured to process a workpiece by leading outgoing laser pulse of the optical deflection unit to the workpiece and irradiating the workpiece with the laser pulse, as the amplitude corresponding to each of the frequencies, the control unit supplies an amplitude having the ratio that is close to the lowest ratio among ratios of the outgoing energy with respect to the incoming energy of the laser pulse at an amplitude having the largest outgoing energy of the optical deflection unit.