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1.发明授权
公开(公告)号：US4907177A
公开(公告)日：1990-03-06
申请号：US264341
申请日：1988-10-31
申请人： Victor Curreri , John F. Klein , Janine E. Dubois
发明人： Victor Curreri , John F. Klein , Janine E. Dubois
CPC分类号： F27D21/0014 , C21D11/00 , C30B11/003 , F27D19/00 , F27D2019/0003 , F27D2019/0037 , Y10S117/90
摘要： A computerized method of digitally controlling the temperature profile of a heated article in which the temperature profile is defined by a plurality of temperature zones spaced about the article. The temperature profile of the article is monitored and a heating cycle requirement of the temperature zones of the profile is computed. A train of minute increments of power is supplied to heat each respective zone in accordance with the computed heating cycle requirements to achieve a precision approximately between .+-.0.1.degree. and .+-.0.5.degree. C. in a temperature range of approximately 400.degree. C. to 1,350.degree. C.
摘要翻译： 数字控制加热制品的温度分布的计算机化方法，其中温度分布由围绕物品间隔开的多个温度区限定。 监测制品的温度曲线，并计算轮廓温度区的加热循环要求。 根据计算出的加热循环要求，提供一列微小的功率增量来加热各个区域，以在大约400℃的温度范围内实现大约在+/- 0.1℃和+/- 0.5℃之间的精度 至1350℃
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公开(公告)号：US4952780A
公开(公告)日：1990-08-28
申请号：US264378
申请日：1988-10-31
CPC分类号： F27D21/0014 , C30B11/003 , C30B25/10 , C30B31/12 , F27D19/00 , F27D2019/0003 , F27D2019/0037
摘要： A heating system has a substantially cylindrical hollow muffle formed of a alumina ceramic with a plurality of heat-generating windings therearound. A light-actuated power control is operatively connected to the windings. A computer is operatively connected to a temperature monitor associated with an article being heated in the muffle. The computer is also operatively connected to a light-signal generator and provides commands to the generator in the form of a train of equidistantly spaced electrical pulses in response to temperature measurements provided by the monitor such that an article can be heated to an elevated steady state temperature and controlled at that steady state temperature within precise predetermined limits. The precise temperature control makes the system particularly valuable in the fabrication of crystals with uniform properties or having special growth requirements.
摘要翻译： 加热系统具有由氧化铝陶瓷形成的大致圆柱形的中空马弗管，其周围具有多个发热绕组。 光驱功率控制器可操作地连接到绕组。 计算机可操作地连接到与在马弗管中加热的物品相关联的温度监视器。 计算机还可操作地连接到光信号发生器，并且响应于由监视器提供的温度测量，以等距离间隔的电脉冲串的形式向发生器提供命令，使得物品可以被加热到升高的稳定状态 温度，并在该稳态温度下控制在精确的预定限度内。 精确的温度控制使得该系统在制造具有均匀性能或具有特殊增长要求的晶体中特别有价值。
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公开(公告)号：US5063518A
公开(公告)日：1991-11-05
申请号：US437420
申请日：1989-11-16
申请人： Victor Curreri , John Klein , Janine Dubois
发明人： Victor Curreri , John Klein , Janine Dubois
IPC分类号： H05B3/00 , C30B9/00 , C30B11/00 , C30B13/28 , C30B15/20 , C30B19/10 , F27D19/00 , F27D21/00 , F27D21/04 , G05D23/22
CPC分类号： C30B11/006 , F27D19/00 , F27D21/0014 , G05D23/1904 , G05D23/22
摘要： The present invention monitors thermocouple data from a semiconductor furnace. The data is checked against a first set of profiles which mimic an intended operational temperature profile for the furnace. If the temperature measured in any zone of the furnace falls outside a first set of maximum and minimum limits fixed by the mimicking profiles, a warning is generated thereby giving operational personnel an opportunity to correct the condition. If the condition remains unchecked and further deviation occurs, a second condition is reached as defined by a corresponding second set of mimicking maximum and minimum profiles. This condition is established as a serious condition which will cause a microprocessor to terminate power supply to the furnace. Otherwise, the quality of the grown crystal would be jeopardized; or sufficiently excessive power would be delivered to the furnace so as to cause its damage or destruction.
摘要翻译： 本发明监测来自半导体炉的热电偶数据。 根据模拟炉的预期操作温度曲线的第一组曲线来检查数据。 如果在炉的任何区域中测量的温度落在由模拟轮廓固定的第一组最大和最小极限之外，则会产生警告，从而使操作人员有机会纠正这种情况。 如果条件保持未被检查并且进一步发生偏差，则通过模拟最大和最小轮廓的对应的第二组定义达到第二条件。 这种条件被确定为严重的条件，这将导致微处理器终止对炉的供电。 否则，生长晶体的质量将受到损害; 或足够过量的功率将被输送到炉子，以便引起其损坏或破坏。
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