Temperature Controller of Semiconductor Wafer and Temperature Control Method of Semiconductor Wafer

    公开(公告)号:US20180053669A1

    公开(公告)日:2018-02-22

    申请号:US15239064

    申请日:2016-08-17

    Applicant: KELK Ltd.

    Inventor: Kazuhiro Mimura

    Abstract: A plurality of temperature adjusters each independently include a control loop. A manipulated variable calculator is configured to give manipulated variables to the respective temperature adjusters and includes a reference model output generator configured to provide a reference model as a response output for reaching a temperature setpoint when a first control loop having a slowest response speed among the control loops is defined to have a 100% manipulated variable. The reference model output generator includes: a simulator configured to determine a manipulated variable pattern by conducting successive search of a switching time; and a reference model obtained from a response in which, among the plurality of control loops, the first control loop having the slowest response speed is defined to have the 100% manipulated variable, and the rest of the plurality of control loops are controlled to follow the first control loop.

    Thermostat valve with coolant stoppage function

    公开(公告)号:US09695735B2

    公开(公告)日:2017-07-04

    申请号:US13990529

    申请日:2011-11-29

    Inventor: Andreas Auweder

    CPC classification number: F01P7/16 F01P7/165 F01P2007/146 G05D23/22

    Abstract: The invention relates to a thermostat valve for a cooling system of an internal combustion engine with a coolant stoppage function, comprising a first bypass valve element and a second bypass valve element, a main valve element to be arranged in a counterpart to a connection to a coolant radiator, and a crossmember to be arranged between an engine outlet and an engine inlet, which crossmember forms a valve seat for the first bypass valve element and the second bypass valve element, wherein, on its outer side, the crossmember has a collar which forms an axial supporting region for the counterpart and which is loaded in the axial direction by a compression spring, with the result that the collar is forced in the direction of the counterpart.

    WEARABLE DEVICE THAT WARMS AND/OR COOLS TO NOTIFY A USER
    5.
    发明申请
    WEARABLE DEVICE THAT WARMS AND/OR COOLS TO NOTIFY A USER 有权
    保证和/或冷却用户通知的易于使用的设备

    公开(公告)号:US20160300462A1

    公开(公告)日:2016-10-13

    申请号:US14727922

    申请日:2015-06-02

    CPC classification number: G08B6/00 G05D23/22

    Abstract: A wearable device that warms or cools to notify a user wearing the device is provided. The wearable device includes: a plurality of individual heating and/or cooling spots, a plurality of dots pulsating in heating/cooling sections, and/or a plurality of dots moving around in heating/cooling sections. A system is also provided comprising a wearable device, a scheduling device, and a communication between the wearable device and the scheduling device.

    Abstract translation: 提供了一种穿戴或冷却以通知佩戴该装置的用户的穿戴式装置。 可穿戴装置包括:多个单独的加热和/或冷却点,在加热/冷却部分中脉动的多个点和/或在加热/冷却部分周围移动的多个点。 还提供一种系统,其包括可穿戴设备,调度设备以及可穿戴设备与调度设备之间的通信。

    Temperature regulating apparatus, exposure apparatus, and device manufacturing method
    6.
    发明授权
    Temperature regulating apparatus, exposure apparatus, and device manufacturing method 有权
    温度调节装置,曝光装置和装置的制造方法

    公开(公告)号:US08199313B2

    公开(公告)日:2012-06-12

    申请号:US12212207

    申请日:2008-09-17

    Inventor: Yoshiyuki Okada

    Abstract: A temperature regulating apparatus includes a heat exchanger and regulates a temperature of a first medium by performing heat exchange between the first medium and a second medium via the heat exchanger. A regulating operation unit generates a flow rate regulating signal so that the temperature of the first medium flowing out from a primary side outlet of the heat exchanger becomes equal to a target temperature. A control valve regulates a flow rate of the second medium based on the flow rate regulating signal. A correcting operation unit (a) calculates, based on temperatures detected by first, second, third and fourth temperature sensors, a heat exchange amount of the heat exchanger, a logarithmic mean temperature difference or an average temperature in the heat exchanger, and the flow rate of the second medium, (b) calculates an overall heat transfer coefficient of the heat exchanger based on the calculated heat exchange amount and the calculated logarithmic mean temperature difference or the calculated average temperature, and the flow rate of the second medium, (c) obtains a ratio (ΔG) of a change (Q2-Q′2) in the heat exchange amount to a change (ΔF2) in the flow rate of the second medium based on the calculated flow rate (F2) of the second medium and the calculated overall heat transfer coefficient (K), and (d) corrects a gain of the regulating operation unit based on the obtained ratio.

    Abstract translation: 温度调节装置包括热交换器,并且通过经由热交换器进行第一介质和第二介质之间的热交换来调节第一介质的温度。 调节操作单元产生流量调节信号,使得从热交换器的一次侧出口流出的第一介质的温度等于目标温度。 控制阀基于流量调节信号来调节第二介质的流量。 校正操作单元(a)基于由第一,第二,第三和第四温度传感器检测的温度,热交换器的热交换量,对数平均温度差或热交换器中的平均温度,以及流量 (b)基于所计算的热交换量和计算的对数平均温度差或计算出的平均温度和第二介质的流量(c)计算热交换器的总传热系数 )基于所计算的第二介质的流量(F2),获得热交换量中的变化(Q2-Q'2)与第二介质的流量的变化(&Dgr; F2)的比(&Dgr; G) 第二介质和计算出的总传热系数(K),以及(d)基于获得的比率校正调节操作单元的增益。

    Temperature control apparatus, processing apparatus, and temperature control method
    7.
    发明授权
    Temperature control apparatus, processing apparatus, and temperature control method 有权
    温度控制装置,处理装置和温度控制方法

    公开(公告)号:US08188407B2

    公开(公告)日:2012-05-29

    申请号:US12237584

    申请日:2008-09-25

    Inventor: Masatoshi Nomura

    CPC classification number: G05D23/22 G05D23/1913

    Abstract: Disclosed is an temperature control apparatus including: a resistance heater a resistance value of which changes dependently on a temperature thereof; a fixed resistance connected to the resistance heater in series; a signal generator to output a control signal which has two voltage levels of a first voltage and a second voltage; a switching section to flow a current through the resistance heater and the fixed resistance when the voltage level is the first voltage, and not to flow a current through the resistance heater and the fixed resistance when the voltage level is the second voltage; and a first voltage measuring instrument to measure a voltage value across the fixed resistance at the time when the current flows through the fixed resistance, wherein the signal generator controls the temperature of the resistance heater based on the measured voltage by the first voltage measuring instrument.

    Abstract translation: 公开了一种温度控制装置,包括:电阻加热器,其电阻值根据其温度而变化; 串联电阻加热器的固定电阻; 信号发生器,用于输出具有第一电压和第二电压的两个电压电平的控制信号; 当电压电平为第一电压时,切换部分使电流流过电阻加热器和固定电阻,并且当电压电平为第二电压时,不流过电阻加热器的电流和固定电阻; 以及第一电压测量仪器,用于测量电流流过固定电阻时的固定电阻上的电压值,其中信号发生器基于第一电压测量仪器测量的电压来控制电阻加热器的温度。

    Cooling-control technique for use in a computer system
    8.
    发明授权
    Cooling-control technique for use in a computer system 有权
    用于计算机系统的冷却控制技术

    公开(公告)号:US08164434B2

    公开(公告)日:2012-04-24

    申请号:US12485221

    申请日:2009-06-16

    CPC classification number: G06F1/206 G05B13/048 G05D23/1931 G05D23/22 Y02D10/16

    Abstract: A method for providing control signals to a fan in a computer system is described. During the method, an electronic device receives temperature measurements and a fan-speed measurement performed in the computer system. Using a pattern-recognition model, the electronic device validates the measurements, and excludes any inaccurate measurements, such as those associated with drifting or failed sensors. Next, the electronic device determines control signals for a fan in the computer system using a model of coolant flow in the computer system and/or a slope of a phase-frequency curve of a cross power spectral density function corresponding to a pair of temperature profiles measured, as a function of time, by a pair of thermal sensors. Then, the determined control signals are provided to the fan.

    Abstract translation: 描述了一种用于向计算机系统中的风扇提供控制信号的方法。 在该方法期间,电子设备接收在计算机系统中执行的温度测量和风扇速度测量。 使用模式识别模型,电子设备验证测量,并排除任何不精确的测量,例如与漂移或失败的传感器相关的测量。 接下来,电子设备使用计算机系统中的冷却剂流的模型和/或对应于一对温度分布的交叉功率谱密度函数的相位 - 频率曲线的斜率来确定计算机系统中的风扇的控制信号 通过一对热传感器测量,作为时间的函数。 然后,将确定的控制信号提供给风扇。

    Liquid warming device with basin detection
    9.
    发明授权
    Liquid warming device with basin detection 有权
    液体加温装置,带盆检测

    公开(公告)号:US08138454B2

    公开(公告)日:2012-03-20

    申请号:US12234044

    申请日:2008-09-19

    Abstract: A liquid warming device for heating sterile fluids in a removable basin is described with emphasis on the properties of the basin interaction with the liquid warming device and with a drape that works with the basin to maintain a sterile field above the drape and the top of the basin. Also disclosed are various desirable aspects for a control system for a liquid warming device.

    Abstract translation: 描述了用于加热可移动盆地中的无菌流体的液体加温装置,其重点在于与液体加温装置的盆地相互作用的性质,以及与盆一起工作的悬垂物,以保持蓬松布上方的无菌区域 盆地。 还公开了用于液体加温装置的控制系统的各种期望的方面。

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