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公开(公告)号:US08030620B2
公开(公告)日:2011-10-04
申请号:US12435545
申请日:2009-05-05
申请人: Vincent M. Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
发明人: Vincent M. Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
CPC分类号: B29D11/00365 , B82Y30/00
摘要: A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of the hole corresponds to a portion of the surface of the substrate. A flux of charged particles, e.g., a beam of positive ions of a selected element, is applied to the micro-lens array. The flux of charged particles is focused at selected focal points on the substrate surface at the bottoms of the holes of the micro-lens array. The substrate is tilted at one or more selected angles to displace the locations of the focal points across the substrate surface. By depositing material or etching the surface of the substrate, several substantially uniform nanometer sized features may be rapidly created in each hole on the surface of the substrate in a substantially parallel manner.
摘要翻译: 提供了一种用于以基本上平行的方式产生多个基本均匀的纳米尺度特征的方法,其中微透镜阵列位于基底的表面上,其中每个微透镜包括孔,使得底部 孔对应于基板表面的一部分。 带电粒子的通量,例如所选元素的正离子束,被施加到微透镜阵列。 带电粒子的通量被聚焦在微透镜阵列的孔的底部的基底表面上的选定的焦点处。 衬底以一个或多个选定的角度倾斜,以便将焦点的位置移动穿过衬底表面。 通过沉积材料或蚀刻衬底的表面,可以以基本上平行的方式在衬底表面上的每个孔中快速产生几个基本均匀的纳米尺寸的特征。
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公开(公告)号:US07883839B2
公开(公告)日:2011-02-08
申请号:US11633233
申请日:2006-12-04
申请人: Vincent M Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
发明人: Vincent M Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
CPC分类号: B29D11/00365 , B82Y30/00
摘要: A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of the hole corresponds to a portion of the surface of the substrate. A flux of charged particles, e.g., a beam of positive ions of a selected element, is applied to the micro-lens array. The flux of charged particles is focused at selected focal points on the substrate surface at the bottoms of the holes of the micro-lens array. The substrate is tilted at one or more selected angles to displace the locations of the focal points across the substrate surface. By depositing material or etching the surface of the substrate, several substantially uniform nanometer sized features may be rapidly created in each hole on the surface of the substrate in a substantially parallel manner.
摘要翻译: 提供了一种用于以基本上平行的方式产生多个基本均匀的纳米尺度特征的方法,其中微透镜阵列位于基底的表面上,其中每个微透镜包括孔,使得底部 孔对应于基板表面的一部分。 带电粒子的通量,例如所选元素的正离子束,被施加到微透镜阵列。 带电粒子的通量被聚焦在微透镜阵列的孔的底部的基底表面上的选定的焦点处。 衬底以一个或多个选定的角度倾斜,以便将焦点的位置移动穿过衬底表面。 通过沉积材料或蚀刻衬底的表面,可以以基本上平行的方式在衬底表面上的每个孔中快速产生几个基本均匀的纳米尺寸的特征。
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公开(公告)号:US20090283215A1
公开(公告)日:2009-11-19
申请号:US12435545
申请日:2009-05-05
申请人: Vincent M. Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
发明人: Vincent M. Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
CPC分类号: B29D11/00365 , B82Y30/00
摘要: A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of the hole corresponds to a portion of the surface of the substrate. A flux of charged particles, e.g., a beam of positive ions of a selected element, is applied to the micro-lens array. The flux of charged particles is focused at selected focal points on the substrate surface at the bottoms of the holes of the micro-lens array. The substrate is tilted at one or more selected angles to displace the locations of the focal points across the substrate surface. By depositing material or etching the surface of the substrate, several substantially uniform nanometer sized features may be rapidly created in each hole on the surface of the substrate in a substantially parallel manner.
摘要翻译: 提供了一种用于以基本上平行的方式产生多个基本均匀的纳米尺度特征的方法,其中微透镜阵列位于基底的表面上,其中每个微透镜包括孔,使得底部 孔对应于基板表面的一部分。 带电粒子的通量,例如所选元素的正离子束,被施加到微透镜阵列。 带电粒子的通量被聚焦在微透镜阵列的孔的底部的基底表面上的选定的焦点处。 衬底以一个或多个选定角度倾斜,以便使焦点位置跨越衬底表面。 通过沉积材料或蚀刻衬底的表面,可以以基本上平行的方式在衬底表面上的每个孔中快速产生几个基本均匀的纳米尺寸的特征。
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公开(公告)号:US20120078923A1
公开(公告)日:2012-03-29
申请号:US12893490
申请日:2010-09-29
IPC分类号: G06F17/30
CPC分类号: G06F16/214
摘要: Ordering data objects. The method includes, for each object to be ordered into a set of ordered objects, determining whether the object has static dependencies or dynamic dependencies. A dynamic object is an object that may have circular dependencies. For each static object with only static dependencies, the objects are ordered according to a pre-determined type order. The method further includes, for one or more dynamic objects with dynamic possibly circular dependencies, resolving the circular dependencies such that the dynamic objects can be ordered with the static objects.
摘要翻译: 订购数据对象。 该方法包括:对于要排序成一组有序对象的每个对象,确定该对象是否具有静态依赖性或动态依赖关系。 动态对象是可能具有循环依赖关系的对象。 对于仅具有静态依赖关系的每个静态对象,对象将按照预定的类型顺序进行排序。 该方法还包括对于具有动态可能循环依赖性的一个或多个动态对象,解决循环依赖性,使得动态对象可以与静态对象一起排序。
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