Porous silicon undercut etching deterrent masks and related methods
    1.
    发明授权
    Porous silicon undercut etching deterrent masks and related methods 有权
    多孔硅底切蚀刻威慑面具及相关方法

    公开(公告)号:US07205665B1

    公开(公告)日:2007-04-17

    申请号:US11242237

    申请日:2005-10-03

    IPC分类号: H01L23/48 H01L23/52 H01L29/40

    CPC分类号: H01L21/3063 H01L21/3083

    摘要: The disclosed invention relates to masked silicon structures and methods for making porous silicon in selected areas of a silicon substrate via anodic etching. The masked silicon structures comprise: (1) a frontside barrier layer; and (2) a backside opaque ohmic contact layer. The frontside barrier layer includes a plurality of discrete barrier openings bounded by a contiguous frontside portion of the barrier layer, thereby defining a first aperture having a first shape and a first center point. The backside opaque ohmic contact layer includes a second aperture bounded by a contiguous backside portion of the ohmic contact layer, thereby defining a second aperture having a second shape and a second center point. The first and second center points share a perpendicular axis. The first shape is substantially the same as the second shape but slightly larger, and is trans-concentrically positioned relative to the second shape about the shared axis.

    摘要翻译: 所公开的发明涉及通过阳极蚀刻在硅衬底的选定区域中制造多孔硅的掩模硅结构和方法。 掩模硅结构包括:(1)前侧阻挡层; 和(2)背面不透明欧姆接触层。 前侧阻挡层包括由阻挡层的相邻前侧部分限定的多个离散阻挡开口,从而限定具有第一形状和第一中心点的第一孔。 背面不透明欧姆接触层包括由欧姆接触层的连续背侧部分限定的第二孔,由此限定具有第二形状和第二中心点的第二孔。 第一和第二中心点共享垂直轴。 第一形状基本上与第二形状相同但略大,并且相对于围绕共享轴线的第二形状反式同心地定位。

    Fuel cell electrode pair assemblies and related methods
    2.
    发明授权
    Fuel cell electrode pair assemblies and related methods 失效
    燃料电池电极组件及相关方法

    公开(公告)号:US06811916B2

    公开(公告)日:2004-11-02

    申请号:US10147135

    申请日:2002-05-15

    IPC分类号: H01M208

    摘要: Disclosed herein are fuel cell systems and, more specifically, fuel cell electrode pair and stack assemblies and various methods relating thereto. In one embodiment, the present invention is directed to a fuel cell electrode pair assembly adapted for use with a fuel cell system, wherein the electrode pair assembly comprises an anode structure derived from a first silicon substrate and an opposing cathode structure derived from a second silicon substrate, wherein at least (i) the anode structure comprises one or more discrete anodic porous active regions disposed across a top surface, or (ii) the cathode structure comprises one or more discrete cathodic porous active regions disposed across a top surface, and wherein the anode structure and the cathode structure each have at least one adjoining support member made of silicon, one or more plastics, or one or more glasses, and wherein the at least one adjoining support member of the anode structure and the at least one adjoining support member of the cathode structure have interfacing surfaces that are bonded together with an optional interposing binding material and with at least one selectively positioned bond to thereby form a hermetic seal, wherein the at least one selectively positioned bond is selected from the group consisting of a silicon-metal eutectic-silicon bond, a silicon-frit-silicon bond, a silicon-metal-silicon microwave bond, a silicon-polymer adhesive-silicon bond, a silicon-polymer adhesive-plastic bond, a silicon-polymer adhesive-glass bond, or a silicon-glass anodic bond.

    摘要翻译: 本文公开了燃料电池系统,更具体地,燃料电池电极对和堆叠组件以及与其相关的各种方法。 在一个实施例中,本发明涉及适于与燃料电池系统一起使用的燃料电池电极对组件,其中电极对组件包括衍生自第一硅衬底的阳极结构和源自第二硅衬底的相对阴极结构 衬底,其中至少(i)所述阳极结构包括横跨顶表面设置的一个或多个离散的阳极多孔活性区,或(ii)所述阴极结构包括横跨顶表面设置的一个或多个离散阴极多孔活性区,并且其中 阳极结构和阴极结构各自具有由硅制成的至少一个邻接支撑构件,一个或多个塑料或一个或多个玻璃,并且其中阳极结构的至少一个邻接的支撑构件和至少一个邻接支撑件 阴极结构的构件具有用可选的插入结合材料和至少o结合在一起的接合表面 选择性地定位结合从而形成气密密封,其中所述至少一个选择性定位的键选自由硅 - 金属共晶硅键,硅 - 玻璃料 - 硅键,硅 - 金属 - 硅微波 键合,硅 - 聚合物粘合剂 - 硅键,硅 - 聚合物粘合 - 塑性键,硅 - 聚合物粘合剂 - 玻璃粘合或硅 - 玻璃阳极键。

    Fuel cell electrode pair assemblies and related methods

    公开(公告)号:US07118822B2

    公开(公告)日:2006-10-10

    申请号:US10893424

    申请日:2004-07-16

    IPC分类号: H01M2/08 H01M8/02 H01M4/86

    摘要: Disclosed herein are fuel cell systems and, more specifically, fuel cell electrode pair and stack assemblies and various methods relating thereto. In one embodiment, the present invention is directed to a fuel cell electrode pair assembly adapted for use with a fuel cell system, wherein the electrode pair assembly comprises an anode structure derived from a first silicon substrate and an opposing cathode structure derived from a second silicon substrate, wherein at least (i) the anode structure comprises one or more discrete anodic porous active regions disposed across a top surface, or (ii) the cathode structure comprises one or more discrete cathodic porous active regions disposed across a top surface, and wherein the anode structure and the cathode structure each have at least one adjoining support member made of silicon, one or more plastics, or one or more glasses, and wherein the at least one adjoining support member of the anode structure and the at least one adjoining support member of the cathode structure have interfacing surfaces that are bonded together with an optional interposing binding material and with at least one selectively positioned bond to thereby form a hermetic seal, wherein the at least one selectively positioned bond is selected from the group consisting of a silicon-metal eutectic-silicon bond, a silicon-frit-silicon bond, a silicon-metal-silicon microwave bond, a silicon-polymer adhesive-silicon bond, a silicon-polymer adhesive-plastic bond, a silicon-polymer adhesive-glass bond, or a silicon-glass anodic bond.

    POROUS SILICON UNDERCUT ETCHING DETERRENT MASKS AND RELATED METHODS
    4.
    发明申请
    POROUS SILICON UNDERCUT ETCHING DETERRENT MASKS AND RELATED METHODS 有权
    多孔硅蚀刻蚀刻掩模及相关方法

    公开(公告)号:US20070090530A1

    公开(公告)日:2007-04-26

    申请号:US11242237

    申请日:2005-10-03

    IPC分类号: H01L23/52

    CPC分类号: H01L21/3063 H01L21/3083

    摘要: The disclosed invention relates to masked silicon structures and methods for making porous silicon in selected areas of a silicon substrate via anodic etching. The masked silicon structures comprise: (1) a frontside barrier layer; and (2) a backside opaque ohmic contact layer. The frontside barrier layer includes a plurality of discrete barrier openings bounded by a contiguous frontside portion of the barrier layer, thereby defining a first aperture having a first shape and a first center point. The backside opaque ohmic contact layer includes a second aperture bounded by a contiguous backside portion of the ohmic contact layer, thereby defining a second aperture having a second shape and a second center point. The first and second center points share a perpendicular axis. The first shape is substantially the same as the second shape but slightly larger, and is trans-concentrically positioned relative to the second shape about the shared axis.

    摘要翻译: 所公开的发明涉及通过阳极蚀刻在硅衬底的选定区域中制造多孔硅的掩模硅结构和方法。 掩模硅结构包括:(1)前侧阻挡层; 和(2)背面不透明欧姆接触层。 前侧阻挡层包括由阻挡层的相邻前侧部分限定的多个离散阻挡开口,从而限定具有第一形状和第一中心点的第一孔。 背面不透明欧姆接触层包括由欧姆接触层的连续背侧部分限定的第二孔,从而限定具有第二形状和第二中心点的第二孔。 第一和第二中心点共享垂直轴。 第一形状基本上与第二形状相同但略大,并且相对于围绕共享轴线的第二形状反式同心地定位。

    Fuel cell electrode pair assemblies and related methods
    5.
    发明申请
    Fuel cell electrode pair assemblies and related methods 有权
    燃料电池电极组件及相关方法

    公开(公告)号:US20050003263A1

    公开(公告)日:2005-01-06

    申请号:US10893424

    申请日:2004-07-16

    摘要: Disclosed herein are fuel cell systems and, more specifically, fuel cell electrode pair and stack assemblies and various methods relating thereto. In one embodiment, the present invention is directed to a fuel cell electrode pair assembly adapted for use with a fuel cell system, wherein the electrode pair assembly comprises an anode structure derived from a first silicon substrate and an opposing cathode structure derived from a second silicon substrate, wherein at least (i) the anode structure comprises one or more discrete anodic porous active regions disposed across a top surface, or (ii) the cathode structure comprises one or more discrete cathodic porous active regions disposed across a top surface, and wherein the anode structure and the cathode structure each have at least one adjoining support member made of silicon, one or more plastics, or one or more glasses, and wherein the at least one adjoining support member of the anode structure and the at least one adjoining support member of the cathode structure have interfacing surfaces that are bonded together with an optional interposing binding material and with at least one selectively positioned bond to thereby form a hermetic seal, wherein the at least one selectively positioned bond is selected from the group consisting of a silicon-metal eutectic-silicon bond, a silicon-frit-silicon bond, a silicon-metal-silicon microwave bond, a silicon-polymer adhesive-silicon bond, a silicon-polymer adhesive-plastic bond, a silicon-polymer adhesive-glass bond, or a silicon-glass anodic bond.

    摘要翻译: 本文公开了燃料电池系统,更具体地,燃料电池电极对和堆叠组件以及与其相关的各种方法。 在一个实施例中,本发明涉及适于与燃料电池系统一起使用的燃料电池电极对组件,其中电极对组件包括衍生自第一硅衬底的阳极结构和源自第二硅衬底的相对阴极结构 衬底,其中至少(i)所述阳极结构包括横跨顶表面设置的一个或多个离散的阳极多孔活性区,或(ii)所述阴极结构包括横跨顶表面设置的一个或多个离散阴极多孔活性区,并且其中 阳极结构和阴极结构各自具有由硅制成的至少一个邻接支撑构件,一个或多个塑料或一个或多个玻璃,并且其中阳极结构的至少一个邻接的支撑构件和至少一个邻接支撑件 阴极结构的构件具有用可选的插入结合材料和至少o结合在一起的接合表面 选择性地定位结合从而形成气密密封,其中所述至少一个选择性定位的键选自由硅 - 金属共晶硅键,硅 - 玻璃料 - 硅键,硅 - 金属 - 硅微波 键合,硅 - 聚合物粘合剂 - 硅键,硅 - 聚合物粘合 - 塑性键,硅 - 聚合物粘合剂 - 玻璃粘合或硅 - 玻璃阳极键。