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1.发明申请Apparatus and method for removing a liquid from a rotating substrate surface 审中-公开从旋转基板表面去除液体的装置和方法公开(公告)号：US20060042664A1
公开(公告)日：2006-03-02
申请号：US10930290
申请日：2004-08-30
申请人： Vishwas Hardikar , Chris Karlsrud , Tom Le
发明人： Vishwas Hardikar , Chris Karlsrud , Tom Le
CPC分类号： H01L21/67051 , B08B3/02 , H01L21/02041 , H01L21/67028 , H01L21/6719 , H01L21/67207
摘要： An apparatus and method for performing a rinsing process on a workpiece surface, the apparatus including a platform adapted to seat the workpiece thereon, a chuck connected to the platform and adapted to spin the workpiece during the rinsing process, a mechanical arm adapted to sweep across at least part of the workpiece surface during the rinsing process, first and second rinsing liquid nozzles secured to the mechanical arm, a tensioactive vapor nozzle secured to the arm and disposed between the first and second rinsing liquid nozzles, and first and second flow control elements adapted to separately and independently control rinsing liquid flow rates for the first and second rinsing liquid nozzles, respectively.
摘要翻译： 一种用于在工件表面上执行冲洗过程的装置和方法，该装置包括适于将工件放置在其上的平台，连接到平台并适于在漂洗过程中旋转工件的卡盘，适于跨越 漂洗过程中的工件表面的至少一部分，固定到机械臂的第一和第二冲洗液体喷嘴，固定到臂并设置在第一和第二冲洗液体喷嘴之间的张力蒸气喷嘴，以及第一和第二流量控制元件 分别独立地控制第一和第二冲洗液体喷嘴的冲洗液体流速。
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公开(公告)号：US10891000B2
公开(公告)日：2021-01-12
申请号：US16256794
申请日：2019-01-24
申请人： Kevin Le , Tom Le , Varad Gokhale
发明人： Kevin Le , Tom Le , Varad Gokhale
摘要： The present invention is a touchscreen-based control system for massage chairs that includes a touchscreen device. In another aspect, the present invention is a massage chair controlled by a touchscreen-based control system that includes a touchscreen-based control system. In a further aspect, the present invention is a massage chair controlled by a touchscreen-based control system that includes a touchscreen-based control system having a software program allowing a user to customize a massage function and save it in a memory thereby allowing the user to open or load the saved function. In a further aspect, the present invention is a massage chair controlled by a touchscreen-based control system wherein the massage chair includes an inflatable air-cell to provide massage effects in the footrest and armrest areas of a user.
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