公开(公告)号：US6444028B2

公开(公告)日：2002-09-03

申请号：US85122901

申请日：2001-05-08

申请人： WACKER CHEMIE GMBH

发明人： FRAUENKNECHT AXEL ,  SCHANTZ MATTHAEUS ,  BEER VIKTOR

IPC分类号： C30B29/06 ,  C30B13/08 ,  C30B13/28 ,  C30B15/02 ,  C30B15/36 ,  C30B35/00

CPC分类号： C30B15/02 ,  C30B13/08 ,  C30B13/285 ,  Y10S117/911 ,  Y10T117/1032 ,  Y10T117/1072

摘要： A charging material made from semiconductor material, is used for charging or recharging a melting crucible during the Czochralski crucible-pulling process. This charging material has a polycrystalline semiconductor rod, which at one end has a groove, and a monocrystalline semiconductor rod, which at one end has a tongue, which rods are coupled by means of a tongue-and-groove connection. There is also a holding system for holding a polycrystalline silicon rod during the Czochralski crucible-pulling process or the float zone process, which has a tongue-and-groove connection between the polycrystalline semiconductor rod, which at one end has a groove, and a monocrystalline semiconductor rod, which at one end has a tongue.

摘要翻译： 由半导体材料制成的充电材料用于在切克劳斯基坩埚拉拔过程中对熔化坩埚进行充电或再充电。 该充电材料具有一端具有凹槽的多晶硅半导体棒和一端具有舌状物的单晶半导体棒，这些棒通过榫槽连接而联接。 还有一种在切克劳斯基坩埚拉拔过程或浮区过程中保持多晶硅棒的保持系统，其在一端具有凹槽的多晶半导体棒之间具有榫槽连接， 单晶半导体棒，其一端具有舌头。