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公开(公告)号：US07595632B2
公开(公告)日：2009-09-29
申请号：US12006438
申请日：2008-01-02
IPC分类号： G01R31/02
CPC分类号： H01L21/68785 , A46D1/00 , G01R1/06705 , G01R1/18 , G01R31/2862 , G01R31/2868 , G01R31/2886 , G01R31/2887 , H01L21/68714
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
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公开(公告)号：US07348787B2
公开(公告)日：2008-03-25
申请号：US11317400
申请日：2005-12-22
CPC分类号： H01L21/68785 , A46D1/00 , G01R1/06705 , G01R1/18 , G01R31/2862 , G01R31/2868 , G01R31/2886 , G01R31/2887 , H01L21/68714
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
摘要翻译： 晶片探测台配备有基本上围绕用于保持测试装置的支撑表面的集成环境控制外壳，这种外壳限制在外壳的内部和外部之间的流体连通，并且优选地还提供EMI屏蔽和黑暗环境。 尽管定位支撑表面或探针的移动，外壳的内部和外部之间的有限通信保持基本上恒定。 支撑表面和探针的定位机构各自至少部分地位于外壳的外部。
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公开(公告)号：US07009383B2
公开(公告)日：2006-03-07
申请号：US10925526
申请日：2004-08-25
IPC分类号： G01R31/02
CPC分类号： H01L21/68785 , A46D1/00 , G01R1/06705 , G01R1/18 , G01R31/2862 , G01R31/2868 , G01R31/2886 , G01R31/2887 , H01L21/68714
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
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公开(公告)号：US5532609A
公开(公告)日：1996-07-02
申请号：US417982
申请日：1995-04-06
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probe holders. The positioning mechanisms for the supporting surface and probe holders each have portions located at least partially outside of the enclosure for transferring movement mechanically to the surface or holders, respectively.
摘要翻译： 晶片探测台配备有基本上围绕用于保持测试装置的支撑表面的集成环境控制外壳，这种外壳限制在外壳的内部和外部之间的流体连通，并且优选地还提供EMI屏蔽和黑暗环境。 即使支撑表面或探针支架的定位运动，外壳的内部和外部之间的有限通信也保持基本恒定。 用于支撑表面和探针保持器的定位机构各自具有至少部分位于外壳外部的部分，用于将机械机械分别转移到表面或保持器。
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公开(公告)号：US5266889A
公开(公告)日：1993-11-30
申请号：US891232
申请日：1992-05-29
IPC分类号： H01L21/66 , H01L21/68 , H01L21/683 , G01R31/02 , G01R1/073
CPC分类号： H01L21/68
摘要： A wafer probe station is equipped with a compact, integrated controlled-environment enclosure providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck and test probe provided by the enclosure is maintained despite the fact that the probe and chuck positioning mechanisms extend partially outside the enclosure, with positioning members extending movably between the interior and exterior of the enclosure. Sealing is maintained by movable sealing members at the locations where the positioning members penetrate the enclosure.
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公开(公告)号：US06636059B2
公开(公告)日：2003-10-21
申请号：US10268244
申请日：2002-10-09
IPC分类号： G01R1073
CPC分类号： H01L21/68785 , A46D1/00 , G01R1/06705 , G01R1/18 , G01R31/2862 , G01R31/2868 , G01R31/2886 , G01R31/2887 , H01L21/68714
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
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公开(公告)号：US06801047B2
公开(公告)日：2004-10-05
申请号：US10441646
申请日：2003-05-19
IPC分类号： G01R1073
CPC分类号： H01L21/68785 , A46D1/00 , G01R1/06705 , G01R1/18 , G01R31/2862 , G01R31/2868 , G01R31/2886 , G01R31/2887 , H01L21/68714
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
摘要翻译： 晶片探测台配备有基本上围绕用于保持测试装置的支撑表面的集成环境控制外壳，这种外壳限制在外壳的内部和外部之间的流体连通，并且优选地还提供EMI屏蔽和黑暗环境。 尽管定位支撑表面或探针的移动，外壳的内部和外部之间的有限通信保持基本上恒定。 支撑表面和探针的定位机构各自至少部分地位于外壳的外部。
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公开(公告)号：US06486687B2
公开(公告)日：2002-11-26
申请号：US10068728
申请日：2002-02-06
IPC分类号： G01R1073
CPC分类号： H01L21/68785 , A46D1/00 , G01R1/06705 , G01R1/18 , G01R31/2862 , G01R31/2868 , G01R31/2886 , G01R31/2887 , H01L21/68714
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
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公开(公告)号：US06380751B2
公开(公告)日：2002-04-30
申请号：US09886353
申请日：2001-06-20
IPC分类号： G01R1073
CPC分类号： H01L21/68785 , A46D1/00 , G01R1/06705 , G01R1/18 , G01R31/2862 , G01R31/2868 , G01R31/2886 , G01R31/2887 , H01L21/68714
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
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公开(公告)号：US06313649B2
公开(公告)日：2001-11-06
申请号：US08790969
申请日：1997-01-29
IPC分类号： G01R3102
CPC分类号： H01L21/68785 , G01R1/06705 , G01R1/06772 , G01R1/073 , G01R31/2886 , G01R35/00
摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probe holders. The positioning mechanisms for the supporting surface and probe holders each have portions located at least partially outside of the enclosure for transferring movement mechanically to the surface or holders, respectively.
摘要翻译： 晶片探测台配备有基本上围绕用于保持测试装置的支撑表面的集成环境控制外壳，这种外壳限制在外壳的内部和外部之间的流体连通，并且优选地还提供EMI屏蔽和黑暗环境。 即使支撑表面或探针支架的定位运动，外壳的内部和外部之间的有限通信也保持基本恒定。 用于支撑表面和探针保持器的定位机构各自具有至少部分位于外壳外部的部分，用于将机械机械分别转移到表面或保持器。
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