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    Surface inspection tool
    1.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号：US06624884B1

    公开(公告)日：2003-09-23

    申请号：US08840351

    申请日：1997-04-28

    申请人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

    发明人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

    IPC分类号： G01N2188

    CPC分类号： G01N21/88

    摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, light reflected from the surface at an angle slightly offset from perpendicular is routed through a telecentric lens to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration system periodically reflects the scanning beam back to a detector to form a reference signal for use in absolute reflectivity measurements.

    摘要翻译： 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的一个实施例中，从表面以从垂直方向稍微偏离的角度反射的光通过远心透镜被路由到检测器，该检测器将反射光束的强度转换为模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 中值滤波器和导数分析可以应用于像素数据，以检测指示缺陷的偏差。 可选的校准系统周期性地将扫描光束反射回检测器以形成用于绝对反射率测量的参考信号。

    Surface inspection tool
    2.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号：US06704435B1

    公开(公告)日：2004-03-09

    申请号：US08841214

    申请日：1997-04-28

    申请人： Wayne Isami Imaino ,  Anthony Juliana ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

    发明人： Wayne Isami Imaino ,  Anthony Juliana ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

    IPC分类号： G06K900

    CPC分类号： G01N21/9506

    摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. The reflected beam is routed to a detector which converts the intensity of the reflected into an analog signal. The analog signal is sampled and digitized to generate pixel data stored in a buffer. Various analyses are performed on the data including calculating a rate of change in the pixel data. If the rate of change in the pixel data exceeds a selected threshold that indicates a possible defect if it occurs in the data area of the disk.

    摘要翻译： 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的一个实施例中，入射光束以与垂直稍微偏移的角度被引导到待检查的表面上，使得反射光束与入射光束物理分离。 反射光束被路由到检测器，该检测器将反射的强度转换成模拟信号。 模拟信号被采样和数字化以产生存储在缓冲器中的像素数据。 对包括计算像素数据的变化率的数据进行各种分析。 如果像素数据的变化率超过选择的阈值，如果在磁盘的数据区域中发生可能的缺陷则表示可能的缺陷。

    Surface inspection tool
    3.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号：US5917589A

    公开(公告)日：1999-06-29

    申请号：US840339

    申请日：1997-04-28

    申请人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    发明人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    IPC分类号： G01N21/94 ,  G01N21/88

    CPC分类号： G01N21/94

    摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The LIT uses a mechanical lifter which moves the disk through the laser scan lines (i.e. perpendicular to the scan lines) to allow the entire surface on each side of the disk to be scanned. The light reflected from the surface is routed to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. The edges of the planar surface in the pixel data are determined for each scan line while data acquisition is in progress. A mask is applied to direct the defect detection only to meaningful areas of the disk while data acquisition is in progress. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects.

    摘要翻译： 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 LIT使用机械升降器，其将盘移动通过激光扫描线（即垂直于扫描线），以允许扫描盘的每一侧上的整个表面。 从表面反射的光被路由到检测器，其将反射光束的强度转换成模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 在进行数据采集的同时，为每个扫描行确定像素数据中的平面的边缘。 应用掩码将缺陷检测仅指向磁盘的有意义的区域，同时数据采集正在进行。 中值滤波器和导数分析可以应用于像素数据，以检测指示缺陷的偏差。

    Surface inspection tool
    4.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号：US5867261A

    公开(公告)日：1999-02-02

    申请号：US840352

    申请日：1997-04-28

    申请人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    发明人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    IPC分类号： G01N21/95 ,  G01N21/88

    CPC分类号： G01N21/9506

    摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The LIT uses a mechanical lifter which moves the disk through the laser scan lines (i.e. perpendicular to the scan lines) to allow the entire surface on each side of the disk to be scanned. The light reflected from the surface is routed to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. The edges of the planar surface in the pixel data are determined for each scan line while data acquisition is in progress. A mask is applied to direct the defect detection only to meaningful areas of the disk while data acquisition is in progress. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration mirror is taught which is positioned to reflect substantially all of the incident beam during a segment of the scan line as the reflected calibration beam which is converted to an analog signal, sampled and digitized similarly to the reflected beam from the surface being inspected. By comparing the intensity of the calibration beam to the reflected beam the reflectivity of the surface can be measured.

    摘要翻译： 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 LIT使用机械升降器，其将盘移动通过激光扫描线（即垂直于扫描线），以允许扫描盘的每一侧上的整个表面。 从表面反射的光被路由到检测器，其将反射光束的强度转换成模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 在进行数据采集的同时，为每个扫描行确定像素数据中的平面的边缘。 应用掩码将缺陷检测仅指向磁盘的有意义的区域，同时数据采集正在进行。 中值滤波器和导数分析可以应用于像素数据，以检测指示缺陷的偏差。 可选的校准反射镜被定位成在扫描线的一段期间基本上反射所有入射光束，作为被反射的校准光束，该反射校准光束被转换成模拟信号，与来自被检测表面的反射光束类似地进行采样和数字化 。 通过比较校准光束与反射光束的强度，可以测量表面的反射率。

    Surface inspection tool
    6.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号：US5969370A

    公开(公告)日：1999-10-19

    申请号：US840358

    申请日：1997-04-28

    申请人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    发明人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    IPC分类号： G01N21/88 ,  G11B7/0037 ,  G11B7/26

    CPC分类号： G01N21/88 ,  G11B7/00375 ,  G11B7/26

    摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, a disk is moved into an inspection subcompartment between a pair of air knives which blow partially ionized air onto the planar sides of the disk to remove loose particles adhering thereto. After the disk moves through the air knife streams, the two laser beams scan the two sides of the disk. Preferably the scan occurs after the air knives have been turned off and as the disk moves out of the inspection subcompartment. The subcompartment may optionally have an air source which forces air to flow out of the subcompartment to aid in maintaining a clean environment for inspection.

    摘要翻译： 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的一个实施例中，盘被移动到一对气刀之间的检查子舱中，所述气刀将部分电离空气吹送到盘的平面侧以除去附着在其上的松散颗粒。 在磁盘移动通过气刀流之后，两个激光束扫描磁盘的两侧。 优选地，扫描发生在气刀已经关闭之后并且当盘移出检查子舱室时。 子舱可以可选地具有迫使空气流出子舱的空气源，以帮助保持清洁的环境以供检查。

    Surface inspection tool
    7.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号：US5933230A

    公开(公告)日：1999-08-03

    申请号：US840354

    申请日：1997-04-28

    申请人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    发明人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/00

    CPC分类号： G01N21/94 ,  G01N21/8806

    摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The choice of a polygon scanner is preferred, but other scanning means such as a galvonometer mirror could be used. A separate polygon scanner is used for each side of the disk. The polygons are arranged in a common plane, but rotate in opposite directions to reduce the inteference which might otherwise result when the beams pass through the central hole in the disk and impinge on the detection channel for the other side. Preferably the rotation of the polygons is synchonized and angularly offset so that the two beams are synchonized and offset. The rotating polygons may conveniently be included in a system which scans each of the two laser beams through a telecentric lens assembly onto the surface and which routes the reflected light which passes back through the telecentric lens and is reflected from the polygons to the detection component.

    摘要翻译： 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 多边形扫描器的选择是优选的，但是可以使用诸如电流计镜之类的其它扫描装置。 磁盘的每一侧都使用单独的多边形扫描器。 多边形布置在公共平面中，但是沿相反方向旋转以减小当光束通过盘中的中心孔并且撞击到另一侧的检测通道时可能导致的干涉。 优选地，多边形的旋转被同步并且成角度地偏移，使得两个光束被同步和偏移。 旋转的多边形可以方便地包括在将两个激光束中的每一个通过远心透镜组件扫描到表面上并且将穿过远心透镜返回的反射光路由并从多边形反射到检测部件的系统中。

    Surface inspection tool
    8.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号：US6100971A

    公开(公告)日：2000-08-08

    申请号：US841037

    申请日：1997-04-28

    申请人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    发明人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

    IPC分类号： G01N21/95 ,  G01N21/88

    CPC分类号： G01N21/9506

    摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. Although slightly offset the reflected beam is routed back through the telecentric lens and scanner which are used for the incident beam. Preferably an aperture mask is placed in the path of the reflected beam and the incident beam to limit the cone of scattered light. Since the incident and reflected beams are physically separated, there may be an aperture for each beam, but the two masks may be physically connected. The aperture masks may also be used for alignment adjustments of the beams.

    摘要翻译： 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的实施例中，入射光束以与垂直稍微偏移的角度被引导到要检查的表面上，使得反射光束与入射光束物理分离。 虽然稍微偏移，但是反射光束通过用于入射光束的远心透镜和扫描仪返回。 优选地，孔径掩模被放置在反射光束和入射光束的路径中以限制散射光的锥体。 由于事件和反射光束在物理上是分开的，所以每个光束可能有孔径，但是两个掩模可以物理连接。 光圈掩模也可用于光束的对准调整。

    Glass substrate inspection tool having a telecentric lens assembly
    10.
    发明授权
    Glass substrate inspection tool having a telecentric lens assembly 失效
    具有远心透镜组件的玻璃基板检查工具

    公开(公告)号：US5945685A

    公开(公告)日：1999-08-31

    申请号：US974272

    申请日：1997-11-19

    申请人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles Cheng-Hsing Lee ,  Wai Cheung Leung ,  Hal Jervis Rosen

    发明人： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles Cheng-Hsing Lee ,  Wai Cheung Leung ,  Hal Jervis Rosen

    IPC分类号： G01N21/94 ,  G01N21/86

    CPC分类号： G01N21/94

    摘要： A glass disk substrate inspection tool uses a polarized laser beam that is directed to the first surface of the disk substrate at Brewster's angle and is then transmitted through the disk substrate to a light detector that generates a signal representative of the intensity of the light received. Because the light polarized parallel to the plane of incidence, i.e., the plane formed by the line of the incident beam and a line perpendicular to the surface of the disk substrate, is completely transmitted, there is no surface reflection at either the first or second surfaces of the disk substrate. The polarized beam is directed by a first rotating scanner to the input of a telecentric lens assembly that provides an output beam parallel to its optical axis as the beam is being scanned. The beam is then directed by a first fixed mirror to strike the first surface of the disk substrate at Brewster's angle as the beam is scanned along a line across the first disk surface. The beam is then transmitted through the substrate to the second surface of the disk substrate to a second fixed mirror that redirects the beam to a second telecentric lens assembly. The light passes through the second telecentric lens assembly in the direction reverse to the direction of passage through the first telecentric lens assembly so that the output beam from the second telecentric lens assembly is directed to its focal point. This focal point coincides with the point of contact of a second rotating scanner synchronized for rotation with the first scanner. The second scanner directs the transmitted beam to the light detector.

    摘要翻译： 玻璃盘基板检查工具使用以布鲁斯特角度指向盘基片的第一表面的偏振激光束，然后通过盘基片传输到产生表示所接收光的强度的信号的光检测器。 因为平行于入射平面的光，即由入射光束的线形成的平面和垂直于盘基片的表面的一条线被完全透射，所以在第一或第二处没有表面反射 盘基片的表面。 偏振光束由第一旋转扫描器引导到远心透镜组件的输入端，当远射镜被扫描时，其提供平行于其光轴的输出光束。 然后，当沿着穿过第一盘表面的线扫描光束时，光束由第一固定镜引导以以布鲁斯特角冲击盘基片的第一表面。 然后将光束通过基板传送到盘基板的第二表面，到第二固定反射镜，其将光束重定向到第二远心透镜组件。 光穿过第二远心透镜组件的方向与穿过第一远心透镜组件的通过方向相反，使得来自第二远心透镜组件的输出光束被引导到其焦点。 该焦点与第一旋转扫描器的接触点重合，该第二旋转扫描器与第一扫描器旋转同步。 第二扫描器将透射光束引导到光检测器。