公开(公告)号：US08616539B2

公开(公告)日：2013-12-31

申请号：US13328254

申请日：2011-12-16

申请人： Wei-Hsiang Tseng ,  Jui-Chun Peng ,  Kai-Fa Ho ,  Ho-Ping Chen ,  Chia-Yun Lee

发明人： Wei-Hsiang Tseng ,  Jui-Chun Peng ,  Kai-Fa Ho ,  Ho-Ping Chen ,  Chia-Yun Lee

IPC分类号： B25B11/00

CPC分类号： H01L21/6838

摘要： The present disclosure relates to a wafer chuck configured to provide a uniform photoresist layer on a workpiece. In some embodiments, the wafer chuck comprises a plurality of vacuum holes. The plurality of vacuum holes (i.e., more than one) are in fluid communication with a cavity that continuously extends along the top surface between the vacuum holes. A vacuum source, connected to each vacuum hole, is configured to remove gas molecules from the cavity located below the workpiece leaving behind a low pressure vacuum. The use of a plurality of vacuum holes increase the uniformity of the vacuum, thereby preventing the formation of high vacuum areas in close proximity to any specific vacuum hole. The reduction of high vacuum areas reduces wafer bending associated with the high vacuum areas.

摘要翻译： 本公开涉及一种配置成在工件上提供均匀光致抗蚀剂层的晶片卡盘。 在一些实施例中，晶片卡盘包括多个真空孔。 多个真空孔（即多于一个）与沿着真空孔之间的顶表面连续延伸的空腔流体连通。 连接到每个真空孔的真空源构造成从位于工件下方的空腔去除气体分子，留下低压真空。 使用多个真空孔增加真空的均匀性，从而防止在任何特定的真空孔附近形成高真空区域。 高真空区域的减少减少了与高真空区域相关联的晶片弯曲。

公开(公告)号：US20130156947A1

公开(公告)日：2013-06-20

申请号：US13328254

申请日：2011-12-16

申请人： Wei-Hsiang Tseng ,  Jui-Chun Peng ,  Kai-Fa Ho ,  Ho-Ping Chen ,  Chia-Yun Lee

发明人： Wei-Hsiang Tseng ,  Jui-Chun Peng ,  Kai-Fa Ho ,  Ho-Ping Chen ,  Chia-Yun Lee

IPC分类号： H01L21/683 ,  B05D3/12

CPC分类号： H01L21/6838

摘要： The present disclosure relates to a wafer chuck configured to provide a uniform photoresist layer on a workpiece. In some embodiments, the wafer chuck comprises a plurality of vacuum holes. The plurality of vacuum holes (i.e., more than one) are in fluid communication with a cavity that continuously extends along the top surface between the vacuum holes. A vacuum source, connected to each vacuum hole, is configured to remove gas molecules from the cavity located below the workpiece leaving behind a low pressure vacuum. The use of a plurality of vacuum holes increase the uniformity of the vacuum, thereby preventing the formation of high vacuum areas in close proximity to any specific vacuum hole. The reduction of high vacuum areas reduces wafer bending associated with the high vacuum areas.

摘要翻译： 本公开涉及一种配置成在工件上提供均匀光致抗蚀剂层的晶片卡盘。 在一些实施例中，晶片卡盘包括多个真空孔。 多个真空孔（即多于一个）与沿着真空孔之间的顶表面连续延伸的空腔流体连通。 连接到每个真空孔的真空源构造成从位于工件下方的空腔去除气体分子，留下低压真空。 使用多个真空孔增加真空的均匀性，从而防止在任何特定的真空孔附近形成高真空区域。 高真空区域的减少减少了与高真空区域相关联的晶片弯曲。

公开(公告)号：US08829877B2

公开(公告)日：2014-09-09

申请号：US13332384

申请日：2011-12-21

申请人： Chuang-Wei Tseng ,  Kai-Fu Chen ,  Chia-Yun Lee

发明人： Chuang-Wei Tseng ,  Kai-Fu Chen ,  Chia-Yun Lee

IPC分类号： G05F1/00 ,  H01H47/20 ,  H01H83/00 ,  H02H3/00 ,  H02M1/12 ,  H02M1/00 ,  H03H7/01

CPC分类号： H02M1/12 ,  H02M2001/0012 ,  H03H7/0115 ,  Y10T307/852

摘要： A resonance frequency adjusting circuit in electronic communication with a power supply and a load connected to the power supply includes a first LC filter, a capacitor, a switch, and a frequency detecting and control module. The first LC filter circuit is electrically connected between the power supply and the load. The switch is electrically connected between the capacitor and ground. The frequency detecting and control module detects a current transient frequency of the load, compares the current transient frequency with a first resonance frequency of the first LC filter circuit, and controls the switch to turn on/off according to the comparison.

摘要翻译： 与电源和连接到电源的负载电连接的谐振频率调节电路包括第一LC滤波器，电容器，开关和频率检测和控制模块。 第一个LC滤波电路电连接在电源和负载之间。 开关电连接在电容器和地之间。 频率检测和控制模块检测负载的当前瞬态频率，将当前瞬态频率与第一LC滤波电路的第一谐振频率进行比较，并根据比较控制开关导通/断开。

公开(公告)号：US08601316B2

公开(公告)日：2013-12-03

申请号：US13043628

申请日：2011-03-09

申请人： Kai-Fu Chen ,  Chia-Yun Lee ,  Chuang-Wei Tseng

发明人： Kai-Fu Chen ,  Chia-Yun Lee ,  Chuang-Wei Tseng

IPC分类号： G06F11/07

CPC分类号： G06F1/28 ,  H02J1/14 ,  H02J4/00 ,  Y10T307/391 ,  Y10T307/469

摘要： A power supply system includes a power supply unit, a number of electrical loads and a sequence circuit. The power supply unit provides power for the electrical loads through the sequence circuit. When any one of the electrical loads fails the sequence circuit will record the failure, shut down and lock the power supply unit to prevent the power supply unit from powering the electrical loads.

摘要翻译： 电源系统包括电源单元，多个电负载和顺序电路。 电源单元通过顺序电路为电气负载提供电力。 当任何一个电气负载故障时，顺序电路将记录故障，关闭并锁定电源单元，以防止电源单元为电气负载供电。

公开(公告)号：US08502096B2

公开(公告)日：2013-08-06

申请号：US13101134

申请日：2011-05-04

申请人： Chia-Yun Lee

发明人： Chia-Yun Lee

IPC分类号： H01H17/08 ,  H01H15/00

CPC分类号： H01R13/6675 ,  H01R13/701 ,  H01R24/20 ,  H01R2103/00

摘要： A power adapter includes a shell, a power converter, a first power line, a second power line, a switch received in the shell, and a DC plug. The first power line connects the power rectifier to an external power source, and includes a first terminal and a second terminal. The second power line connects the power rectifier to the DC plug. The switch includes a fixed shaft fixed on the shell, a rotating plate rotatably positioned on the fixed shaft, a number of poles equidistantly disposed on the rotating plate, a number of conductive sheets for conducting the first and second terminal, and a stirring device connecting to the second power line. The conductive sheets are disposed on the rotating plate corresponding to the odd/even poles. When the second power line is pulled, the stirring device rotates the rotating plate to electrically connect or disconnect the first and second terminal.

摘要翻译： 电源适配器包括外壳，电源转换器，第一电源线，第二电源线，接收在外壳中的开关和DC插头。 第一电力线将功率整流器连接到外部电源，并且包括第一端子和第二端子。 第二条电源线将电源整流器连接到直流插头。 开关包括固定在壳体上的固定轴，可旋转地定位在固定轴上的旋转板，等距设置在旋转板上的若干极，多个用于导电第一和第二端子的导电片，以及连接 到第二条电力线。 导电片设置在与奇数/偶数极对应的旋转板上。 当第二电源线被拉动时，搅拌装置旋转旋转板以电连接或断开第一和第二端子。