Track spin wafer chuck
    2.
    发明授权
    Track spin wafer chuck 有权
    跟踪旋转晶片卡盘

    公开(公告)号:US08616539B2

    公开(公告)日:2013-12-31

    申请号:US13328254

    申请日:2011-12-16

    IPC分类号: B25B11/00

    CPC分类号: H01L21/6838

    摘要: The present disclosure relates to a wafer chuck configured to provide a uniform photoresist layer on a workpiece. In some embodiments, the wafer chuck comprises a plurality of vacuum holes. The plurality of vacuum holes (i.e., more than one) are in fluid communication with a cavity that continuously extends along the top surface between the vacuum holes. A vacuum source, connected to each vacuum hole, is configured to remove gas molecules from the cavity located below the workpiece leaving behind a low pressure vacuum. The use of a plurality of vacuum holes increase the uniformity of the vacuum, thereby preventing the formation of high vacuum areas in close proximity to any specific vacuum hole. The reduction of high vacuum areas reduces wafer bending associated with the high vacuum areas.

    摘要翻译: 本公开涉及一种配置成在工件上提供均匀光致抗蚀剂层的晶片卡盘。 在一些实施例中,晶片卡盘包括多个真空孔。 多个真空孔(即多于一个)与沿着真空孔之间的顶表面连续延伸的空腔流体连通。 连接到每个真空孔的真空源构造成从位于工件下方的空腔去除气体分子,留下低压真空。 使用多个真空孔增加真空的均匀性,从而防止在任何特定的真空孔附近形成高真空区域。 高真空区域的减少减少了与高真空区域相关联的晶片弯曲。

    Defect estimation apparatus and related method
    3.
    发明授权
    Defect estimation apparatus and related method 失效
    缺陷估计装置及相关方法

    公开(公告)号:US07395462B2

    公开(公告)日:2008-07-01

    申请号:US11306360

    申请日:2005-12-25

    IPC分类号: G06F11/00

    CPC分类号: G11B20/1816 G11B2220/2541

    摘要: A weighted defect estimating apparatus and a related method for determining a defect estimation value are disclosed. The weighted defect detecting apparatus includes: a defect detecting unit for generating a defect value when a defect in a predetermined region of an optical disc is detected; a weighting circuit, electrically connected to the defect detecting unit, to generate a weighted defect value according to the defect value and a weighting factor corresponding to a location of the defect on the optical disc; and a computing module, electrically connected to the weighting circuit, for computing the defect estimation value according to a plurality of weighted defect values corresponding to the predetermined region.

    摘要翻译: 公开了一种用于确定缺陷估计值的加权缺陷估计装置和相关方法。 加权缺陷检测装置包括:缺陷检测单元,用于当检测到光盘的预定区域中的缺陷时产生缺陷值; 电连接到所述缺陷检测单元的加权电路,以根据所述缺陷值产生加权缺陷值,以及与所述光盘上的所述缺陷的位置相对应的加权因子; 以及计算模块,电连接到所述加权电路,用于根据与所述预定区域对应的多个加权缺陷值计算所述缺陷估计值。

    Track Spin Wafer Chuck
    4.
    发明申请
    Track Spin Wafer Chuck 有权
    轨道旋转晶片卡盘

    公开(公告)号:US20130156947A1

    公开(公告)日:2013-06-20

    申请号:US13328254

    申请日:2011-12-16

    IPC分类号: H01L21/683 B05D3/12

    CPC分类号: H01L21/6838

    摘要: The present disclosure relates to a wafer chuck configured to provide a uniform photoresist layer on a workpiece. In some embodiments, the wafer chuck comprises a plurality of vacuum holes. The plurality of vacuum holes (i.e., more than one) are in fluid communication with a cavity that continuously extends along the top surface between the vacuum holes. A vacuum source, connected to each vacuum hole, is configured to remove gas molecules from the cavity located below the workpiece leaving behind a low pressure vacuum. The use of a plurality of vacuum holes increase the uniformity of the vacuum, thereby preventing the formation of high vacuum areas in close proximity to any specific vacuum hole. The reduction of high vacuum areas reduces wafer bending associated with the high vacuum areas.

    摘要翻译: 本公开涉及一种配置成在工件上提供均匀光致抗蚀剂层的晶片卡盘。 在一些实施例中,晶片卡盘包括多个真空孔。 多个真空孔(即多于一个)与沿着真空孔之间的顶表面连续延伸的空腔流体连通。 连接到每个真空孔的真空源构造成从位于工件下方的空腔去除气体分子,留下低压真空。 使用多个真空孔增加真空的均匀性,从而防止在任何特定的真空孔附近形成高真空区域。 高真空区域的减少减少了与高真空区域相关联的晶片弯曲。

    EFM/EFM+ encoder and method thereof
    5.
    发明授权
    EFM/EFM+ encoder and method thereof 有权
    EFM / EFM +编码器及其方法

    公开(公告)号:US07378994B1

    公开(公告)日:2008-05-27

    申请号:US11620764

    申请日:2007-01-08

    IPC分类号: H03M5/00

    摘要: An EFM/EFM+ encoder and a method thereof, performing digital sum value (DSV) protection in an Eight-to-Fourteen/Eight-to-Fourteen Plus (EFM/EFM+) encoding system to generate a data frame to be recorded on a recording medium. The method comprises modulating source data to the data frame having a predetermined number of channel bits, determining merging bits and DSV based on the channel bits, and changing the predetermined number of the channel bits in the data frame based on the DSV and the merging bits. The changing the predetermined number of the channel bits comprises inserting or removing a channel bit at the end of the data frame.

    摘要翻译: 一种EFM / EFM +编码器及其方法,在八至十四/八至四加(EFM / EFM +)编码系统中执行数字和值(DSV)保护,以产生要记录在记录上的数据帧 中。 该方法包括将源数据调制到具有预定数目的信道位的数据帧,基于信道位确定合并位和DSV,并且基于DSV和合并位改变数据帧中的预定数目的信道位 。 改变预定数量的信道比特包括在数据帧结束时插入或去除信道比特。

    DEFECT ESTIMATION APPARATUS AND RELATED METHOD
    7.
    发明申请
    DEFECT ESTIMATION APPARATUS AND RELATED METHOD 失效
    缺陷估算装置及相关方法

    公开(公告)号:US20070150212A1

    公开(公告)日:2007-06-28

    申请号:US11306360

    申请日:2005-12-25

    IPC分类号: G06F19/00

    CPC分类号: G11B20/1816 G11B2220/2541

    摘要: A weighted defect estimating apparatus and a related method for determining a defect estimation value are disclosed. The weighted defect detecting apparatus includes: a defect detecting unit for generating a defect value when a defect in a predetermined region of an optical disc is detected; a weighting circuit, electrically connected to the defect detecting unit, to generate a weighted defect value according to the defect value and a weighting factor corresponding to a location of the defect on the optical disc; and a computing module, electrically connected to the weighting circuit, for computing the defect estimation value according to a plurality of weighted defect values corresponding to the predetermined region.

    摘要翻译: 公开了一种用于确定缺陷估计值的加权缺陷估计装置和相关方法。 加权缺陷检测装置包括:缺陷检测单元,用于当检测到光盘的预定区域中的缺陷时产生缺陷值; 电连接到所述缺陷检测单元的加权电路,以根据所述缺陷值产生加权缺陷值,以及与所述光盘上的所述缺陷的位置相对应的加权因子; 以及计算模块,电连接到所述加权电路,用于根据与所述预定区域对应的多个加权缺陷值计算所述缺陷估计值。

    INFORMATION RECORDING DEVICE AND RELATED METHOD
    8.
    发明申请
    INFORMATION RECORDING DEVICE AND RELATED METHOD 审中-公开
    信息记录装置及相关方法

    公开(公告)号:US20070133367A1

    公开(公告)日:2007-06-14

    申请号:US11306039

    申请日:2005-12-14

    IPC分类号: G11B20/10

    摘要: An information recording device and a related method are disclosed. The information recording device and the related method are capable of adjusting a phase error between a first synchronization signal and a second synchronization signal, where the first synchronization signal is synchronous to a location on a recording medium, the second synchronization signal is synchronous to a data pattern to be written onto the recording medium, and the data pattern comprise a sync pattern and a non-sync pattern. The information recording device includes a phase detector for detecting the phase error between the first synchronization signal and the second synchronization signal; and a controller, electrically connected to the phase detector, for adjusting the length of the non-sync pattern of the data pattern according to the phase error, thereby making the second synchronization signal substantially synchronized with the first synchronization signal.

    摘要翻译: 公开了一种信息记录装置和相关方法。 信息记录装置和相关方法能够调整第一同步信号和第二同步信号之间的相位误差,其中第一同步信号与记录介质上的位置同步,第二同步信号与数据同步 模式被写入到记录介质上,并且数据模式包括同步模式和非同步模式。 信息记录装置包括用于检测第一同步信号和第二同步信号之间的相位误差的相位检测器; 以及控制器,电连接到相位检测器,用于根据相位误差调整数据模式的非同步模式的长度,从而使第二同步信号与第一同步信号基本上同步。

    INFORMATION RECORDING DEVICE AND RELATED METHOD
    9.
    发明申请
    INFORMATION RECORDING DEVICE AND RELATED METHOD 审中-公开
    信息记录装置及相关方法

    公开(公告)号:US20070127343A1

    公开(公告)日:2007-06-07

    申请号:US11164749

    申请日:2005-12-05

    IPC分类号: G11B7/0045

    摘要: An information recording device and related method are disclosed. The information recording device is capable of adjusting a phase difference between a first synchronization signal and a second synchronization signal. The information recording device includes an encoder for generating a run-length of an encoded data; a phase detector for detecting the phase difference between the first and the second synchronous signals; a shift offset controller, electrically connected to the phase detector, for generating a shift information according to the phase difference; and a write pulse generator, electrically connected to the encoder and the shift offset controller, for generating a write pulse signal according to the run-length of the encoded data and the shift information, thereby making the first synchronous signal synchronized with the second synchronous signal.

    摘要翻译: 公开了一种信息记录装置及相关方法。 信息记录装置能够调整第一同步信号和第二同步信号之间的相位差。 信息记录装置包括用于生成编码数据的游程长度的编码器; 相位检测器,用于检测第一和第二同步信号之间的相位差; 电连接到所述相位检测器的移位偏移控制器,用于根据所述相位差产生移位信息; 以及写入脉冲发生器,电连接到编码器和偏移偏移控制器,用于根据编码数据的行程长度和移位信息产生写脉冲信号,从而使第一同步信号与第二同步信号同步 。