公开(公告)号：US07616312B2

公开(公告)日：2009-11-10

申请号：US11169423

申请日：2005-06-29

申请人： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

发明人： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC分类号： G01B11/00

CPC分类号： G01R31/308 ,  G01R31/311

摘要： An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

摘要翻译： 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测（PDP）光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

公开(公告)号：US07659981B2

公开(公告)日：2010-02-09

申请号：US11261996

申请日：2005-10-27

申请人： William Lo ,  Kenneth Wilsher ,  Nagamani Nataraj ,  Nina Boiadjieva

发明人： William Lo ,  Kenneth Wilsher ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC分类号： G01B11/00

CPC分类号： G01R31/307

摘要： A system for probing a DUT is disclosed, the system having a pulsed laser source, a CW laser source, beam optics designed to point a reference beam and a probing beam at the same location on the DUT, optical detectors for detecting the reflected reference and probing beams, and a collection electronics. The beam optics is a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the incident laser beam into two beams of orthogonal polarization—one beam simulating a reference beam while the other simulating a probing beam. Both reference and probing beams are pointed to the same location on the DUT. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the reference and probing beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

摘要翻译： 公开了一种用于探测DUT的系统，该系统具有脉冲激光源，CW激光源，设计用于将DUT上的相同位置处的参考光束和探测光束指向的光束光学元件，用于检测反射参考的光学检测器和 探测梁和收集电子设备。 光束光学器件是公共路径偏振微分探测（PDP）光学器件。 共轨PDP光学器件将入射激光束分成模拟参考光束的两个正交偏振光束，另一个模拟探测光束。 参考和探测光束都指向DUT上相同的位置。 由于CMOS晶体管的固有不对称性，参考光束和探测光束与DUT的相互作用导致每个光束中的不同相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

公开(公告)号：US20070046947A1

公开(公告)日：2007-03-01

申请号：US11261996

申请日：2005-10-27

申请人： William Lo ,  Kenneth Wilsher ,  Nagamani Nataraj ,  Nina Boiadjieva

发明人： William Lo ,  Kenneth Wilsher ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC分类号： G01B9/02

CPC分类号： G01R31/307

摘要： A system for probing a DUT is disclosed, the system having a pulsed laser source, a CW laser source, beam optics designed to point a reference beam and a probing beam at the same location on the DUT, optical detectors for detecting the reflected reference and probing beams, and a collection electronics. The beam optics is a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the incident laser beam into two beams of orthogonal polarization - one beam simulating a reference beam while the other simulating a probing beam. Both reference and probing beams are pointed to the same location on the DUT. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the reference and probing beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

摘要翻译： 公开了一种用于探测DUT的系统，该系统具有脉冲激光源，CW激光源，设计用于将DUT上的相同位置处的参考光束和探测光束指向的光束光学元件，用于检测反射参考的光学检测器和 探测梁和收集电子设备。 光束光学器件是公共路径偏振微分探测（PDP）光学器件。 公共路径PDP光学器件将入射激光束分成两束正交偏振光束 - 一个模拟参考光束的光束，另一个模拟探测光束。 参考和探测光束都指向DUT上相同的位置。 由于CMOS晶体管的固有不对称性，参考光束和探测光束与DUT的相互作用导致每个光束中的不同相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

公开(公告)号：US20070002329A1

公开(公告)日：2007-01-04

申请号：US11169423

申请日：2005-06-29

申请人： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

发明人： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC分类号： G01B9/02

CPC分类号： G01R31/308 ,  G01R31/311

摘要： An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

摘要翻译： 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测（PDP）光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。