Inter-process sensing of wafer outcome
    1.
    发明授权
    Inter-process sensing of wafer outcome 有权
    晶圆结果的过程间感测

    公开(公告)号:US07257494B2

    公开(公告)日:2007-08-14

    申请号:US11126471

    申请日:2005-05-11

    IPC分类号: G06F19/00 G01L21/66

    CPC分类号: H01L21/67253

    摘要: A method of monitoring a microelectronic manufacturing process includes the implementation of a monitoring sensor that is configured to operate in an inter-process mode. During an inter-process mode, a first valve is opened in order to initiate transfer of a processing substrate between at least one processing chamber and a transfer chamber. The monitoring sensor is programmed to monitor the interior of the at least one processing chamber only after the first valve is opened.

    摘要翻译: 监测微电子制造过程的方法包括实施监控传感器,其被配置为在处理间模式下操作。 在处理间模式期间,打开第一阀以启动处理基板在至少一个处理室和转移室之间的转移。 监控传感器被编程为仅在第一阀打开之后监视至少一个处理室的内部。

    Wall assembly comprising panels configured to reside in an overhead structure
    3.
    发明授权
    Wall assembly comprising panels configured to reside in an overhead structure 有权
    壁组件,其包括被配置为驻留在架空结构中的面板

    公开(公告)号:US08402700B2

    公开(公告)日:2013-03-26

    申请号:US12979191

    申请日:2010-12-27

    IPC分类号: E04B1/346

    CPC分类号: E04B2/827

    摘要: In one aspect of the present invention, a wall assembly may be used to divide the area of a particular living space. The wall assembly may comprise a first and second panel. The first panel may reside within an internal cavity of the second panel. The first panel may also extend beyond the second panel such that both panels may collectively form a wall. A cable may connect the wall assembly to an overhead structure such that it may pull the wall into a storage space of the overhead structure.

    摘要翻译: 在本发明的一个方面,壁组件可用于划分特定生活空间的区域。 壁组件可以包括第一和第二面板。 第一面板可以位于第二面板的内部空腔内。 第一面板还可以延伸超过第二面板,使得两个面板可以共同形成壁。 电缆可以将墙壁组件连接到顶部结构,使得其可以将壁拉到架空结构的存储空间中。

    High performance miniature RF sensor for use in microelectronics plasma processing tools
    4.
    发明授权
    High performance miniature RF sensor for use in microelectronics plasma processing tools 有权
    用于微电子等离子体处理工具的高性能微型RF传感器

    公开(公告)号:US07538562B2

    公开(公告)日:2009-05-26

    申请号:US11725275

    申请日:2007-03-19

    IPC分类号: G01R27/26

    CPC分类号: H01J37/32082 H01J37/32935

    摘要: A high-performance miniature RF sensor that maintains gain, directivity, and isolation in a miniature package. The miniature RF sensor includes stacked current and voltage pickups disposed in a PCB construction, the sensor further including quarter wave transforming filter, triaxial shielding, and skin-effect filtering.

    摘要翻译: 一种高性能微型RF传感器,可在微型封装中保持增益,方向性和隔离度。 微型RF传感器包括布置在PCB结构中的堆叠电流和电压拾取器,该传感器还包括四分之一波长变换滤波器,三轴屏蔽和皮肤效应滤波。

    Wall Assembly Comprising Panels Configured to Reside in an Overhead Structure
    5.
    发明申请
    Wall Assembly Comprising Panels Configured to Reside in an Overhead Structure 有权
    包括配置在顶点结构中的面板的墙组件

    公开(公告)号:US20120159871A1

    公开(公告)日:2012-06-28

    申请号:US12979191

    申请日:2010-12-27

    IPC分类号: E04B1/343

    CPC分类号: E04B2/827

    摘要: In one aspect of the present invention, a wall assembly may be used to divide the area of a particular living space. The wall assembly may comprise a first and second panel. The first panel may reside within an internal cavity of the second panel. The first panel may also extend beyond the second panel such that both panels may collectively form a wall. A cable may connect the wall assembly to an overhead structure such that it may pull the wall into a storage space of the overhead structure.

    摘要翻译: 在本发明的一个方面,壁组件可用于划分特定生活空间的区域。 壁组件可以包括第一和第二面板。 第一面板可以位于第二面板的内部空腔内。 第一面板还可以延伸超过第二面板,使得两个面板可以共同形成壁。 电缆可以将墙壁组件连接到顶部结构,使得其可以将壁拉到架空结构的存储空间中。