公开(公告)号：US20110286004A1

公开(公告)日：2011-11-24

申请号：US13068659

申请日：2011-05-16

申请人： Wolfgang Holzapfel ,  Michael Hermann ,  Karsten Sändig

发明人： Wolfgang Holzapfel ,  Michael Hermann ,  Karsten Sändig

IPC分类号： G01B11/02

CPC分类号： G01D5/347 ,  G01D5/3473 ,  G01D5/38

摘要： A method an optical position measuring instrument for detecting a relative position of a scanning unit and a scale. The optical position measuring instrument includes a scale and a scanning unit, wherein the scanning unit and the scale are movable with respect to one another along a curved measurement direction. The scanning unit includes a detector unit, and a reflector unit that has a first wave front corrector, a beam direction inverter and a second wave front corrector. the reflector unit is disposed and/or embodied in the scanning unit so that beams first pass through a first combination of the scale and the first wave front corrector, then via the beam direction inverter, a back-reflection of partial beams is effected in a direction of the scale, and the partial beams then pass through a second combination of the scale and the second wave front corrector before the partial beams then arrive at the detector unit, wherein, via the reflector unit, it is ensured that wave front deformations of the partial beams, which result via a first diffraction at the scale, are converted into wave front deformations that compensate for resultant wave front deformations of the partial beams upon a second diffraction at the scale.

摘要翻译： 一种用于检测扫描单元和刻度尺的相对位置的光学位置测量仪的方法。 光学位置测量仪器包括刻度和扫描单元，其中扫描单元和刻度尺沿着弯曲的测量方向可相对于彼此移动。 扫描单元包括检测器单元和具有第一波前校正器，波束方向反相器和第二波前校正器的反射器单元。 反射器单元设置和/或实施在扫描单元中，使得光束首先通过刻度尺和第一波前校正器的第一组合，然后经由光束方向反相器，部分光束的背反射在 方向，然后部分光束在部分光束然后到达检测器单元之前通过标尺和第二波前校正器的第二组合，其中，经由反射器单元确保波前变形 通过尺度上的第一次衍射产生的部分光束被转换为波前变形，其在尺度上进行第二次衍射时补偿部分光束的合成波前变形。

公开(公告)号：US07154609B2

公开(公告)日：2006-12-26

申请号：US10635422

申请日：2003-08-06

申请人： Wolfgang Holzapfel ,  Michael Hermann ,  Walter Huber ,  Völker Hofer ,  Ulrich Benner ,  Karsten Sändig

发明人： Wolfgang Holzapfel ,  Michael Hermann ,  Walter Huber ,  Völker Hofer ,  Ulrich Benner ,  Karsten Sändig

IPC分类号： G01B9/02

CPC分类号： G01D5/38

摘要： An interferential position measuring arrangement including a light source, which emits a beam of rays and an optical element, which converts the beam of rays emitted by the light source into an incoming beam of rays. A scale grating which splits the incoming beam of rays into a first partial beam of rays and a second partial beam of rays. A first scanning grating that causes splitting of the first partial beam of rays and a second scanning grating that causes splitting of the second partial beam of rays, wherein a periodically modulated interferential fringe pattern with definite spatial interferential fringe pattern period results in a detection plane. A detection arrangement which causes splitting of light entering through the detection arrangement into at least three different spatial directions and optoelectronic detector elements arranged in the at least three spatial directions for detecting phase-shifted scanning signal.

摘要翻译： 一种包括发射光束的光源和光学元件的干涉位置测量装置，其将由光源发射的光线转换成输入的光束。 将光束入射到第一部分射线束和第二部分射线束的刻度光栅。 使第一部分光束分裂的第一扫描光栅和引起第二部分光束分裂的第二扫描光栅，其中具有确定的空间干涉条纹图案周期的周期性调制的干涉条纹图案导致检测平面。 一种检测装置，其使通过检测装置进入的光分裂成至少三个不同的空间方向，并且在至少三个空间方向上布置的光电检测器元件用于检测相移的扫描信号。

公开(公告)号：US09766098B2

公开(公告)日：2017-09-19

申请号：US13068659

申请日：2011-05-16

申请人： Wolfgang Holzapfel ,  Michael Hermann ,  Karsten Sändig

发明人： Wolfgang Holzapfel ,  Michael Hermann ,  Karsten Sändig

IPC分类号： G01B11/02 ,  G01N21/41 ,  G01B11/30 ,  G01D5/347 ,  G01D5/38

CPC分类号： G01D5/347 ,  G01D5/3473 ,  G01D5/38

摘要： An optical position measuring instrument including a scale and a scanning unit, wherein the scanning unit and the scale are movable with respect to one another. The scanning unit includes a detector unit, and a reflector unit that has a first and second wave front correctors and a beam direction inverter. The reflector unit is disposed so that beams first pass through the scale and the first wave front corrector, then a back-reflection of partial beams is effected in a direction of the scale, and the partial beams then pass through the scale and the second wave front corrector before the partial beams then arrive at the detector unit, wherein it is ensured that wave front deformations of the partial beams are converted into wave front deformations that compensate for resultant wave front deformations of the partial beams upon a second diffraction at the scale.

公开(公告)号：US07710578B2

公开(公告)日：2010-05-04

申请号：US11900268

申请日：2007-09-11

申请人： Karsten Sändig ,  Wolfgang Holzapfel

发明人： Karsten Sändig ,  Wolfgang Holzapfel

IPC分类号： G01B11/02

CPC分类号： G01D5/38

摘要： A position measuring arrangement for detecting a relative position is disclosed. The position measuring arrangement includes a reflection scale graduation and a scanning unit having a plurality of optical elements. The plurality of optical elements includes a combining grating, a retro-reflector element, a scanning grating and detector elements. The optical elements are arranged so that light beams and/or partial light beams of a scanning beam path act on the reflection scale graduation at least twice; a directional reversal of the incident partial light beams impinging on the reflection scale graduation perpendicularly with respect to the measuring direction takes place by the retro-reflector element; and a pair of partial light beams impinges in a non-parallel manner on the combining grating, and the combining grating brings the partial light beams impinging on the combining grating to interference, so that phase-shifted signals are detected by the plurality of detector elements.

摘要翻译： 公开了一种用于检测相对位置的位置测量装置。 位置测量装置包括反射刻度刻度和具有多个光学元件的扫描单元。 多个光学元件包括组合光栅，后向反射器元件，扫描光栅和检测器元件。 光学元件布置成使得扫描光束路径的光束和/或部分光束作用于反射刻度刻度至少两次; 反射器元件发生入射到相对于测量方向垂直的反射刻度刻蚀的入射部分光束的方向反转; 并且一对部分光束以非平行的方式入射到组合光栅上，并且组合光栅使入射在组合光栅上的部分光束干涉，使得相移信号被多个检测器元件 。

公开(公告)号：US07872762B2

公开(公告)日：2011-01-18

申请号：US12321642

申请日：2009-01-23

申请人： Michael Hermann ,  Karsten Sändig

发明人： Michael Hermann ,  Karsten Sändig

IPC分类号： G01B11/02 ,  G01B9/02 ,  G01D5/36

CPC分类号： G01D5/38

摘要： An arrangement for generating phase-shifted incremental signals characterizing relative positions of two objects moving with respect to each other along a measuring direction. The measuring arrangement includes a light source emitting bundles of beams, a measurement grating, a plurality of optional gratings and a scanning unit. The scanning unit includes a grating in a scanning plane, wherein the grating includes a plurality of blocks arranged periodically along the measuring direction with a grating periodicity equaling a fringe pattern periodicity, and each block includes n grating sections arranged along the measuring direction, each of the n grating sections having a periodic grating structure, deflecting the bundles of beams propagated through each of the n grating sections in several different spatial directions. The scanning unit further includes a plurality of detector elements arranged downstream of the grating, wherein the detector elements are arranged in the spatial directions in the detector plane, and wherein the detector plane is located where the bundles of beams coming from the grating are spatially separated. The fringe pattern is formed in the scanning plane by the bundles of beams emitted by the light source interacting with the measurement grating and the optional gratings.

摘要翻译： 一种用于产生相移增量信号的装置，其特征在于沿着测量方向相对于彼此移动的两个物体的相对位置。 测量装置包括发射束束的光源，测量光栅，多个可选光栅和扫描单元。 扫描单元包括扫描平面中的光栅，其中光栅包括沿着测量方向周期性地布置的多个块，其光栅周期性等于条纹图案周期，并且每个块包括沿着测量方向布置的n个光栅部分， n个光栅部分具有周期性的光栅结构，使在多个不同空间方向上传播通过n个光栅部分中的每一个的光束束偏转。 扫描单元还包括布置在光栅下游的多个检测器元件，其中检测器元件沿检测器平面中的空间方向布置，并且其中检测器平面位于来自光栅的光束束在空间上分离 。 通过与测量光栅和可选光栅相互作用的光源发射的束束在扫描平面中形成条纹图案。