公开(公告)号：US20110079711A1

公开(公告)日：2011-04-07

申请号：US12804139

申请日：2010-07-13

申请人： Wolfram Buehler ,  Holger Doemer ,  Matthias Lang ,  Joerg Stodolka ,  Peter Roediger ,  Emmerich Bertagnolli ,  Heinz Wanzenboeck

发明人： Wolfram Buehler ,  Holger Doemer ,  Matthias Lang ,  Joerg Stodolka ,  Peter Roediger ,  Emmerich Bertagnolli ,  Heinz Wanzenboeck

IPC分类号： G01N23/00

CPC分类号： H01J37/30 ,  H01J37/28 ,  H01J37/3178 ,  H01J2237/0044 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/3174

摘要： A particle beam system 1 for cleaning itself comprises an irradiation system to direct electromagnetic radiation onto the surfaces to be cleaned and a supply system 61 to supply a precursor gas to the interior of the vacuum chamber 11 of the particle beam system 1. The precursor gas is activated in a vicinity of the surfaces to be cleaned and is converted into a reaction gas which reacts with the contaminants present on the irradiated surfaces such that said contaminants may be pumped out then.

摘要翻译： 用于清洁的粒子束系统1本身包括将电磁辐射引导到要清洁的表面上的照射系统和用于将前体气体供应到粒子束系统1的真空室11的内部的供应系统61.前体气体 在待清洁表面附近被活化，并被转化成与存在于照射表面上的污染物反应的反应气体，从而可以将所述污染物抽出。

公开(公告)号：US08507854B2

公开(公告)日：2013-08-13

申请号：US12804139

申请日：2010-07-13

申请人： Wolfram Buehler ,  Holger Doemer ,  Matthias Lang ,  Joerg Stodolka ,  Peter Roediger ,  Emmerich Bertagnolli ,  Heinz Wanzenboeck

发明人： Wolfram Buehler ,  Holger Doemer ,  Matthias Lang ,  Joerg Stodolka ,  Peter Roediger ,  Emmerich Bertagnolli ,  Heinz Wanzenboeck

IPC分类号： H01J37/30

CPC分类号： H01J37/30 ,  H01J37/28 ,  H01J37/3178 ,  H01J2237/0044 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/3174

摘要： A particle beam system 1 for cleaning itself comprises an irradiation system to direct electromagnetic radiation onto the surfaces to be cleaned and a supply system 61 to supply a precursor gas to the interior of the vacuum chamber 11 of the particle beam system 1. The precursor gas is activated in a vicinity of the surfaces to be cleaned and is converted into a reaction gas which reacts with the contaminants present on the irradiated surfaces such that said contaminants may be pumped out then.

摘要翻译： 用于清洁的粒子束系统1本身包括将电磁辐射引导到要清洁的表面上的照射系统和用于将前体气体供应到粒子束系统1的真空室11的内部的供应系统61.前体气体 在待清洁表面附近被活化，并被转化成与存在于照射表面上的污染物反应的反应气体，从而可以将所述污染物抽出。