公开(公告)号：US20140329667A1

公开(公告)日：2014-11-06

申请号：US14356718

申请日：2012-08-16

申请人： Won Choon Choi ,  Yong Ki Park ,  Na Young Kang ,  Min-Whee Cho ,  Song-Jong Cho ,  Sung Ho Cho ,  Sung Jin Yoon ,  Young-Ju Son

发明人： Won Choon Choi ,  Yong Ki Park ,  Na Young Kang ,  Min-Whee Cho ,  Song-Jong Cho ,  Sung Ho Cho ,  Sung Jin Yoon ,  Young-Ju Son

IPC分类号： B01J27/185

CPC分类号： B01J27/1856 ,  B01D53/8662 ,  B01D2255/1026 ,  B01D2255/2092 ,  B01D2257/2066 ,  B01D2258/0216 ,  B01J23/002 ,  B01J37/0045 ,  B01J37/031 ,  B01J2523/00 ,  Y02C20/30 ,  B01J2523/31 ,  B01J2523/51 ,  B01J2523/822

摘要： The present invention provides a catalyst for the decomposition of a perfluorinated compound containing a halogen acid gas, and a preparation method thereof. According to the present invention, the Ru—P—Al tri-component catalyst for the decomposition of a perfluorinated compound shows an excellent decomposition activity and durability with respect to the decomposition and removal of a perfluorinated compound containing a halogen acid gas, and thus can be used to decompose a chamber cleaning gas, an etchant, a solvent and the like of a perfluorinated compound from the semiconductor manufacturing industry to the LCD processing field. In addition, the present invention can be useful for decomposing and removing a perfluorinated compound discharged in a process using a halogen acid gas such as F2, Cl2, Br2 and the like.

摘要翻译： 本发明提供一种分解含有卤素酸气体的全氟化合物的催化剂及其制备方法。 根据本发明，用于分解全氟化合物的Ru-P-Al三组分催化剂在分解和除去含有卤素酸气体的全氟化合物方面具有优异的分解活性和耐久性，因此可以 用于将全氟化合物的室清洁气体，蚀刻剂，溶剂等从半导体制造工业分解成LCD处理领域。 此外，本发明可用于分解和除去在使用诸如F2，Cl2，Br2等的卤素酸气体的方法中排出的全氟化合物。

公开(公告)号：US09321039B2

公开(公告)日：2016-04-26

申请号：US14356718

申请日：2012-08-16

申请人： Won Choon Choi ,  Yong Ki Park ,  Na Young Kang ,  Min-Whee Cho ,  Song-Jong Cho ,  Sung Ho Cho ,  Sung Jin Yoon ,  Young-Ju Son

发明人： Won Choon Choi ,  Yong Ki Park ,  Na Young Kang ,  Min-Whee Cho ,  Song-Jong Cho ,  Sung Ho Cho ,  Sung Jin Yoon ,  Young-Ju Son

IPC分类号： B01J27/185 ,  B01J37/03 ,  B01J23/00 ,  B01D53/86 ,  B01J37/00

CPC分类号： B01J27/1856 ,  B01D53/8662 ,  B01D2255/1026 ,  B01D2255/2092 ,  B01D2257/2066 ,  B01D2258/0216 ,  B01J23/002 ,  B01J37/0045 ,  B01J37/031 ,  B01J2523/00 ,  Y02C20/30 ,  B01J2523/31 ,  B01J2523/51 ,  B01J2523/822

摘要： The present invention provides a catalyst for the decomposition of a perfluorinated compound containing a halogen acid gas, and a preparation method thereof. According to the present invention, the Ru—P—Al tri-component catalyst for the decomposition of a perfluorinated compound shows an excellent decomposition activity and durability with respect to the decomposition and removal of a perfluorinated compound containing a halogen acid gas, and thus can be used to decompose a chamber cleaning gas, an etchant, a solvent and the like of a perfluorinated compound from the semiconductor manufacturing industry to the LCD processing field. In addition, the present invention can be useful for decomposing and removing a perfluorinated compound discharged in a process using a halogen acid gas such as F2, Cl2, Br2 and the like.

摘要翻译： 本发明提供一种分解含有卤素酸气体的全氟化合物的催化剂及其制备方法。 根据本发明，用于分解全氟化合物的Ru-P-Al三组分催化剂在分解和除去含有卤素酸气体的全氟化合物方面具有优异的分解活性和耐久性，因此可以 用于将全氟化合物的室清洁气体，蚀刻剂，溶剂等从半导体制造工业分解成LCD处理领域。 此外，本发明可用于分解和除去在使用诸如F2，Cl2，Br2等的卤素酸气体的方法中排出的全氟化合物。