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公开(公告)号：US20240208242A1
公开(公告)日：2024-06-27
申请号：US18429655
申请日：2024-02-01
发明人： Gad IGRA , Eyal COHEN , Eran YUNGER , Moshe FINAROV , Tao XU , Jing SHI , Weiguo TONG , Zhigang LI
CPC分类号： B41J2/475 , B41M5/025 , H01L31/188
摘要： Pattern transfer printing (PTP) systems and methods are provided to improve the quality, accuracy and throughput of pattern transfer printing. PTP systems comprise a tape handling unit for handling a tape with pattern transfer sheets sections and for controllably delivering the pattern transfer sheets one-by-one for paste filling and consecutively for pattern transfer, with the tape moving from an unwinder roll to a re-winding roll. PTP systems further comprise a paste filling unit which enables continuous paste filling using a supporting counter roll opposite to the paste filling head, a wafer handling and positioning unit controllably delivering wafers for the pattern transfer in a parallelized manner that increases throughput, a paste transfer unit with enhanced accuracy and efficiency due to exact monitoring and wafer alignment, as well as a print quality control unit.
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公开(公告)号：US20230148357A1
公开(公告)日：2023-05-11
申请号：US17583440
申请日：2022-01-25
发明人： Gad IGRA , Eyal COHEN , Eran YUNGER , Moshe FINAROV , Tao XU , Jing SHI , Weiguo TONG , Zhigang LI
IPC分类号： B41J2/47
CPC分类号： B41J2/47
摘要： Pattern transfer printing (PTP) systems and methods are provided to improve the quality, accuracy and throughput of pattern transfer printing. PTP systems comprise a tape handling unit for handling a tape with pattern transfer sheets sections and for controllably delivering the pattern transfer sheets one-by-one for paste filling and consecutively for pattern transfer, with the tape moving from an unwinder roll to a re-winding roll. PTP systems further comprise a paste filling unit which enables continuous paste filling using a supporting counter roll opposite to the paste filling head, a wafer handling unit controllably delivering wafers for the pattern transfer in a parallelized manner that increases throughput, a paste transfer unit with enhanced accuracy and efficiency due to exact monitoring and wafer alignment, as well as a print quality control unit.
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