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公开(公告)号：US20230019668A1
公开(公告)日：2023-01-19
申请号：US17864419
申请日：2022-07-14
发明人： Amir NOY , Benny NAVEH , Eyal COHEN , Valery SORIN , Dor DROR
摘要： Pattern transfer sheets, methods of monitoring pattern transfer printing, and pattern transfer printing systems are provided, for monitoring and adjusting laser illumination used for transferring paste patterns from trenches on the sheets onto a substrate such as electronic circuitry and/or solar cell substrates. Pattern transfer sheets comprise, outside the pattern, (i) trace mark(s) configured to receive the printing paste, aligned to the trenches and are wider than the width of the illuminating laser beam—to detect misalignment of paste release from within the trace mark(s) and/or (ii) working window marks configured to receive the printing paste, set at specified offsets with respect to specific trenches, with different working window marks set at different offsets—to correct the effective working window by adjusting the power of the laser beam.
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公开(公告)号：US20240208242A1
公开(公告)日：2024-06-27
申请号：US18429655
申请日：2024-02-01
发明人： Gad IGRA , Eyal COHEN , Eran YUNGER , Moshe FINAROV , Tao XU , Jing SHI , Weiguo TONG , Zhigang LI
CPC分类号： B41J2/475 , B41M5/025 , H01L31/188
摘要： Pattern transfer printing (PTP) systems and methods are provided to improve the quality, accuracy and throughput of pattern transfer printing. PTP systems comprise a tape handling unit for handling a tape with pattern transfer sheets sections and for controllably delivering the pattern transfer sheets one-by-one for paste filling and consecutively for pattern transfer, with the tape moving from an unwinder roll to a re-winding roll. PTP systems further comprise a paste filling unit which enables continuous paste filling using a supporting counter roll opposite to the paste filling head, a wafer handling and positioning unit controllably delivering wafers for the pattern transfer in a parallelized manner that increases throughput, a paste transfer unit with enhanced accuracy and efficiency due to exact monitoring and wafer alignment, as well as a print quality control unit.
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公开(公告)号：US20230129519A1
公开(公告)日：2023-04-27
申请号：US17971689
申请日：2022-10-24
发明人： Eyal COHEN , Natali COHEN
摘要： Pattern transfer sheets and methods are provided for printing paste patterns (e.g., thin fingers) with a high aspect ratio and for increasing throughput in pattern transfer printing. Trenches in the pattern transfer sheets, that are configured to be filled with printing paste and to enable releasing the printing paste from the trenches onto a receiving substrate upon illumination by a laser beam—are coated internally by a coating configured to disintegrate upon the illumination. The coating is configured to enhance the releasing of the paste—increasing throughput and printing accuracy. The receiving substrate may be cleaned after paste deposition by removing disintegration products of the coating therefrom. Alternatively or complementarily, laser absorbing dye may be mixed into the printing paste to facilitate its release from the trenches.
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公开(公告)号：US20230148357A1
公开(公告)日：2023-05-11
申请号：US17583440
申请日：2022-01-25
发明人： Gad IGRA , Eyal COHEN , Eran YUNGER , Moshe FINAROV , Tao XU , Jing SHI , Weiguo TONG , Zhigang LI
IPC分类号： B41J2/47
CPC分类号： B41J2/47
摘要： Pattern transfer printing (PTP) systems and methods are provided to improve the quality, accuracy and throughput of pattern transfer printing. PTP systems comprise a tape handling unit for handling a tape with pattern transfer sheets sections and for controllably delivering the pattern transfer sheets one-by-one for paste filling and consecutively for pattern transfer, with the tape moving from an unwinder roll to a re-winding roll. PTP systems further comprise a paste filling unit which enables continuous paste filling using a supporting counter roll opposite to the paste filling head, a wafer handling unit controllably delivering wafers for the pattern transfer in a parallelized manner that increases throughput, a paste transfer unit with enhanced accuracy and efficiency due to exact monitoring and wafer alignment, as well as a print quality control unit.
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