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公开(公告)号：US09038269B2
公开(公告)日：2015-05-26
申请号：US13855105
申请日：2013-04-02
Applicant: XEROX CORPORATION
Inventor： Peter J. Nystrom , Andrew W. Hays , Bijoyraj Sahu
CPC classification number: B41J2/14233 , B41J2/14282 , B41J2/161 , B41J2/1614 , B41J2/1626 , B41J2202/03 , B41J2202/11 , H05K3/125 , Y10T29/42 , Y10T29/49401
Abstract: A nanoprinthead including an array of nanotip cantilevers, where each nanotip cantilever includes a nanotip at an end of a cantilever, and a method for forming the nanoprinthead. Each nanotip may be individually addressable through use of an array of piezoelectric actuators. Embodiments for forming a nanoprinthead including an array of nanotip cantilevers can include an etching process from a material such as a silicon wafer, or the formation of a metal or dielectric nanotip cantilever over a substrate. The nanoprinthead may operate to provide uses for technologies such as dip-pen nanolithography, nanomachining, and nanoscratching, among others.
Abstract translation: 包括纳米尖悬臂阵列的纳米打印头，其中每个纳米尖端悬臂包括在悬臂的端部处的纳米尖端，以及形成纳米针头的方法。 每个纳米尖端可以通过使用压电致动器阵列来单独寻址。 用于形成包括纳米尖悬臂阵列的纳米打印头的实施例可以包括来自诸如硅晶片的材料的蚀刻工艺，或者在衬底上形成金属或电介质纳米尖悬臂。 纳米打印头可以用于提供诸如浸笔纳米光刻，纳米加工和纳米尺度等技术的用途。
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公开(公告)号：US20150217568A1
公开(公告)日：2015-08-06
申请号：US14689361
申请日：2015-04-17
Applicant: XEROX CORPORATION
Inventor： Peter J. Nystrom , Andrew W. Hays , Bijoyraj Sahu
CPC classification number: B41J2/14233 , B41J2/14282 , B41J2/161 , B41J2/1614 , B41J2/1626 , B41J2202/03 , B41J2202/11 , H05K3/125 , Y10T29/42 , Y10T29/49401
Abstract: A nanoprinthead including an array of nanotip cantilevers, where each nanotip cantilever includes a nanotip at an end of a cantilever, and a method for forming the nanoprinthead. Each nanotip may be individually addressable through use of an array of piezoelectric actuators. Embodiments for forming a nanoprinthead including an array of nanotip cantilevers can include an etching process from a material such as a silicon wafer, or the formation of a metal or dielectric nanotip cantilever over a substrate. The nanoprinthead may operate to provide uses for technologies such as dip-pen nanolithography, nanomachining, and nanoscratching, among others.
Abstract translation: 包括纳米尖悬臂阵列的纳米打印头，其中每个纳米尖端悬臂包括在悬臂的端部处的纳米尖端，以及形成纳米针头的方法。 每个纳米尖端可以通过使用压电致动器阵列来单独寻址。 用于形成包括纳米尖悬臂阵列的纳米打印头的实施例可以包括来自诸如硅晶片的材料的蚀刻工艺，或者在衬底上形成金属或电介质纳米尖悬臂。 纳米打印头可以用于提供诸如浸笔纳米光刻，纳米加工和纳米尺度等技术的用途。
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公开(公告)号：US09889653B2
公开(公告)日：2018-02-13
申请号：US14689361
申请日：2015-04-17
Applicant: XEROX CORPORATION
Inventor： Peter J. Nystrom , Andrew W. Hays , Bijoyraj Sahu
CPC classification number: B41J2/14233 , B41J2/14282 , B41J2/161 , B41J2/1614 , B41J2/1626 , B41J2202/03 , B41J2202/11 , H05K3/125 , Y10T29/42 , Y10T29/49401
Abstract: A nanoprinthead including an array of nanotip cantilevers, where each nanotip cantilever includes a nanotip at an end of a cantilever, and a method for forming the nanoprinthead. Each nanotip may be individually addressable through use of an array of piezoelectric actuators. Embodiments for forming a nanoprinthead including an array of nanotip cantilevers can include an etching process from a material such as a silicon wafer, or the formation of a metal or dielectric nanotip cantilever over a substrate. The nanoprinthead may operate to provide uses for technologies such as dip-pen nanolithography, nanomachining, and nanoscratching, among others.
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公开(公告)号：US20140295064A1
公开(公告)日：2014-10-02
申请号：US13855105
申请日：2013-04-02
Applicant: XEROX CORPORATION
Inventor： Peter J. Nystrom , Andrew W. Hays , Bijoyraj Sahu
CPC classification number: B41J2/14233 , B41J2/14282 , B41J2/161 , B41J2/1614 , B41J2/1626 , B41J2202/03 , B41J2202/11 , H05K3/125 , Y10T29/42 , Y10T29/49401
Abstract: A nanoprinthead including an array of nanotip cantilevers, where each nanotip cantilever includes a nanotip at an end of a cantilever, and a method for forming the nanoprinthead. Each nanotip may be individually addressable through use of an array of piezoelectric actuators. Embodiments for forming a nanoprinthead including an array of nanotip cantilevers can include an etching process from a material such as a silicon wafer, or the formation of a metal or dielectric nanotip cantilever over a substrate. The nanoprinthead may operate to provide uses for technologies such as dip-pen nanolithography, nanomachining, and nanoscratching, among others.
Abstract translation: 包括纳米尖悬臂阵列的纳米打印头，其中每个纳米尖端悬臂包括在悬臂的端部处的纳米尖端，以及形成纳米针头的方法。 每个纳米尖端可以通过使用压电致动器阵列来单独寻址。 用于形成包括纳米尖悬臂阵列的纳米打印头的实施例可以包括来自诸如硅晶片的材料的蚀刻工艺，或者在衬底上形成金属或电介质纳米尖悬臂。 纳米打印头可以用于提供诸如浸笔纳米光刻，纳米加工和纳米尺度等技术的用途。
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