COATING METHOD AND APPARATUS WITH SUBSTRATE EXTENSION DEVICE
    1.
    发明申请
    COATING METHOD AND APPARATUS WITH SUBSTRATE EXTENSION DEVICE 有权
    涂层方法和装置与基板延伸装置

    公开(公告)号:US20030012888A1

    公开(公告)日:2003-01-16

    申请号:US09903018

    申请日:2001-07-11

    Abstract: A coating method for a hollow substrate including: (a) forming a seamed extended substrate unit composed of a substrate extension device and the substrate, and employing a chuck assembly to internally grip the substrate; (b) dip coating the extended substrate unit while the chuck assembly internally grips the substrate to deposit a layer first on the substrate extension device and then on the substrate; and (c) separating, subsequent to the dip coating the extended substrate unit, the substrate extension device from the substrate.

    Abstract translation: 一种中空基板的涂布方法,包括:(a)形成由基板延伸装置和基板构成的接缝延伸基板单元,并且使用卡盘组件内部夹持基板; (b)浸渍涂覆延伸的基板单元,同时卡盘组件内部夹持基板以首先在基板延伸装置上沉积层,然后在基板上沉积; 和(c)在从底物浸渍涂覆延伸的基底单元之后,分离衬底延伸装置。

    Coating method and apparatus with substrate extension device
    2.
    发明申请
    Coating method and apparatus with substrate extension device 审中-公开
    涂布方法和装置,带底物延伸装置

    公开(公告)号:US20030063971A1

    公开(公告)日:2003-04-03

    申请号:US10289524

    申请日:2002-11-06

    Abstract: A coating method for a hollow substrate including: (a) forming a seamed extended substrate unit composed of a substrate extension device and the substrate, and employing a chuck assembly to internally grip the substrate; (b) dip coating the extended substrate unit while the chuck assembly internally grips the substrate to deposit a layer first on the substrate extension device and then on the substrate; and (c) separating, subsequent to the dip coating the extended substrate unit, the substrate extension device from the substrate.

    Abstract translation: 一种中空基板的涂布方法,包括:(a)形成由基板延伸装置和基板构成的接缝延伸基板单元,并且使用卡盘组件内部夹持基板; (b)浸渍涂覆延伸的基板单元,同时卡盘组件内部夹持基板以首先在基板延伸装置上沉积层,然后在基板上沉积; 和(c)在从底物浸渍涂覆延伸的基底单元之后,分离衬底延伸装置。

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