Method for imprint lithography
    3.
    发明授权
    Method for imprint lithography 有权
    压印光刻方法

    公开(公告)号:US08771529B1

    公开(公告)日:2014-07-08

    申请号:US12894640

    申请日:2010-09-30

    IPC分类号: B44C1/22

    CPC分类号: B29C59/022 G03F7/0002

    摘要: A method of imprint lithography includes imprinting a first pattern with a first template on a first substrate of a lithographic template. A second pattern is imprinted with a second template on the substrate of the lithographic template. The first pattern and the second pattern at least partially overlap, thus forming a third pattern. The third pattern is lithographically formed on a second substrate with the lithographic template. In an embodiment, the first pattern is a concentric line pattern formed by thin film deposition. In an embodiment, the second pattern is a radial line pattern. In an embodiment the first pattern and the second pattern may have line frequency increased.

    摘要翻译: 压印光刻的方法包括在光刻模板的第一衬底上印刷具有第一模板的第一图案。 第二图案在光刻模板的基底上印有第二模板。 第一图案和第二图案至少部分重叠,从而形成第三图案。 第三图案在具有光刻模板的第二基板上光刻形成。 在一个实施例中,第一图案是通过薄膜沉积形成的同心线图案。 在一个实施例中,第二图案是径向线图案。 在一个实施例中,第一图案和第二图案可以具有增加的线频率。

    SiN overcoat for perpendicular magnetic recording media
    4.
    发明申请
    SiN overcoat for perpendicular magnetic recording media 失效
    用于垂直磁记录介质的SiN外涂层

    公开(公告)号:US20070054153A1

    公开(公告)日:2007-03-08

    申请号:US11218702

    申请日:2005-09-02

    IPC分类号: G11B5/65

    CPC分类号: G11B5/72 G11B5/8408

    摘要: A SiON overcoat for use on magnetic media for magnetic recording. The SiON overcoat is deposited by pulsed DC sputtering while applying a negative DC bias. The SiON overcoat is especially useful on perpendicular magnetic recording media because of its ability to deposit thinly and evenly on a rough, granular high coercivity recording media while maintaining excellent corrosion protection properties. A SiON overcoat can be applied less than 3 nm thick while still maintaining excellent mechanical and corrosion protection. The overcoat also has a very high density and water contact angle.

    摘要翻译: 用于磁性介质磁记录的SiON外套。 通过脉冲DC溅射沉积SiON外涂层,同时施加负DC偏压。 SiON外涂层在垂直磁记录介质中特别有用,因为它能够在粗糙的颗粒状高矫顽力记录介质上薄薄均匀地沉积,同时保持优异的防腐蚀性能。 SiON外涂层可以施加小于3nm厚,同时仍然保持优异的机械和腐蚀保护。 外套也具有非常高的密度和水接触角。