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公开(公告)号:US20240102194A1
公开(公告)日:2024-03-28
申请号:US18231099
申请日:2023-08-07
Applicant: YUAN ZE UNIVERSITY , Innolux Corporation
Inventor: Cheng-EN HO , Yu-Lian CHEN , Cheng-Chi WANG , Yu-Jen CHANG , Yung-Sheng LU , Cheng-Yu LEE , Yu-Ming LIN
Abstract: A plating system and a method thereof are disclosed. The plating system performs a N-stage plating drilling filling process in which a M-th stage plating drilling filling process with a M-th current density is performed on a hole of a substrate for a M-th plating time to form a M-th plating layer on the to-be-plated layer, wherein N is a positive integer equal to or greater than 3, and M is a positive integer positive integer in a range of 1 to N. Therefore, the technical effect of providing a higher drilling filling rate than conventional plating filling technology under a condition that a total thickness of plating layers is fixed can be achieved.