公开(公告)号：US10131534B2

公开(公告)日：2018-11-20

申请号：US13278080

申请日：2011-10-20

申请人： Yaoling Pan ,  Lixia Zhou

发明人： Yaoling Pan ,  Lixia Zhou

IPC分类号： G09G5/00 ,  B81B7/00 ,  B81C1/00

摘要： This disclosure provides systems, methods and apparatus for a via structure. In one aspect, an apparatus includes a substrate and a first electromechanical systems device on a surface of the substrate. The first electromechanical systems device includes a first metal layer and a second metal layer. A first via structure can be included on the surface of the substrate. The first via structure includes the first metal layer, the second metal layer, and a third metal layer. The first metal layer of the first electromechanical systems device may be the same metal layer as the first metal layer of the first via structure.

公开(公告)号：US08022896B2

公开(公告)日：2011-09-20

申请号：US11836045

申请日：2007-08-08

申请人： Je-Hsiung Lan ,  Lixia Zhou

发明人： Je-Hsiung Lan ,  Lixia Zhou

IPC分类号： G09G3/00

CPC分类号： G09G3/3466 ,  G02B26/001 ,  G09G2330/04 ,  H01L27/0248

摘要： A MEMS (Microelectromechanical system) device is described. The device includes an array of MEMS elements with addressing lines and MEMS switches configured to selectively connect the addressing lines to a ground or other potential in the event of an over-voltage, such as during an ESD event. The arrangement is particularly advantageous for protecting the array, because the MEMS switches can be formed using substantially the same processing steps which are used to form the array.

摘要翻译： 描述了MEMS（微机电系统）装置。 该器件包括具有寻址线和MEMS开关的MEMS元件的阵列，其被配置为在诸如ESD事件期间在过电压的情况下将寻址线选择性地连接到地或其它电位。 该装置对于保护阵列特别有利，因为可以使用用于形成阵列的基本上相同的处理步骤来形成MEMS开关。

公开(公告)号：US20090040136A1

公开(公告)日：2009-02-12

申请号：US11836045

申请日：2007-08-08

申请人： Je-Hsiung Lan ,  Lixia Zhou

发明人： Je-Hsiung Lan ,  Lixia Zhou

IPC分类号： G09G3/00

CPC分类号： G09G3/3466 ,  G02B26/001 ,  G09G2330/04 ,  H01L27/0248

摘要： A MEMS (Microelectromechanical system) device is described. The device includes an array of MEMS elements with addressing lines and MEMS switches configured to selectively connect the addressing lines to a ground or other potential in the event of an over-voltage, such as during an ESD event. The arrangement is particularly advantageous for protecting the array, because the MEMS switches can be formed using substantially the same processing steps which are used to form the array.

摘要翻译： 描述了MEMS（微机电系统）装置。 该器件包括具有寻址线和MEMS开关的MEMS元件的阵列，其被配置为在诸如ESD事件期间在过电压的情况下将寻址线选择性地连接到地或其它电位。 该装置对于保护阵列特别有利，因为可以使用用于形成阵列的基本上相同的处理步骤来形成MEMS开关。