公开(公告)号：US20100213789A1

公开(公告)日：2010-08-26

申请号：US12707928

申请日：2010-02-18

Applicant: Yasushi IGARASHI

Inventor： Yasushi IGARASHI

IPC: H02N11/00 ,  H01L21/443

CPC classification number: H02N1/006 ,  B81B3/0008 ,  B81B2201/038 ,  B81B2203/0118

Abstract: An electrostatic drive MEMS (Micro Electro Mechanical Systems) element includes a substrate; a fixed electrode disposed on the substrate; a movable electrode arranged to face the fixed electrode in a vertical direction and be movable toward the fixed electrode through an electrostatic force generated between the fixed electrode and the movable electrode; and an insulation film disposed on one of an upper surface of the fixed electrode and a lower surface of the movable electrode and formed of an insulation member containing a conductive fine particle.

Abstract translation: 静电驱动MEMS（微机电系统）元件包括基板; 设置在所述基板上的固定电极; 可动电极，其设置成在垂直方向上面对固定电极，并且可通过固定电极和可动电极之间产生的静电力朝向固定电极移动; 以及绝缘膜，其设置在所述固定电极的上表面和所述可动电极的下表面之一上，并且由包含导电性微粒的绝缘构件形成。