公开(公告)号：US20110136407A1

公开(公告)日：2011-06-09

申请号：US12801555

申请日：2010-06-15

申请人： Yeau-Ren Jeng ,  Yu-Shaung Lin ,  Pay-Yau Huang ,  Yu-Jeng Lin

发明人： Yeau-Ren Jeng ,  Yu-Shaung Lin ,  Pay-Yau Huang ,  Yu-Jeng Lin

IPC分类号： B24B49/00

CPC分类号： B24B37/20 ,  B24B37/042 ,  B24B49/16 ,  G01N3/32 ,  G01N3/56 ,  G01N2203/0019 ,  G01N2203/0282 ,  G01N2203/0676

摘要： A method for predicting the polishing characteristics and life-span of a soft polishing pad includes the steps of: (a) establishing a matching database by means of performing a series of dynamic analysis tests on a new soft polishing pad by a contact probe at different frequencies and under different loads and detecting the surface reaction of the new soft polishing pad, (b) performing a dynamic analysis test on a to-be-tested soft polishing pad by a contact probe at a predetermined frequency and under a predetermined load and detecting the surface reaction of the to-be-tested soft polishing pad, and (c) comparing the surface reaction data of the to-be-tested soft polishing pad with the matching database and predicting the polishing characteristics and life-span of the to-be-tested soft polishing pad subject to the comparison result. Subject to the aforesaid steps, the polishing characteristics and life-span of the to-be-tested soft polishing pad can be predicted without making an actual polishing test, thereby saving a large amount of time and cost.

摘要翻译： 一种用于预测软抛光垫的抛光特性和寿命的方法包括以下步骤：（a）通过在不同的接触探针对新的软抛光垫进行一系列动态分析测试来建立匹配数据库 频率和不同负载下，并检测新的软抛光垫的表面反应，（b）通过接触探针以预定的频率和预定的负载对待测试的软抛光垫进行动态分析测试并检测 待测试的软抛光垫的表面反应，以及（c）将待测试的软抛光垫的表面反应数据与匹配的数据库进行比较，并预测该抛光特性和寿命 - 待测软质抛光垫进行比较。 根据上述步骤，可以预测待测试的软抛光垫的抛光特性和使用寿命，而无需进行实际的抛光测试，从而节省大量的时间和成本。